Cat-CVD (Catalytic-CVD); Its Fundamentals and Application

Hideki Matsumura; Keisuke Ohdaira

doi:10.1149/1.3207575

Cat-CVD (Catalytic-CVD); Its Fundamentals and Application

ECS Transactions ◽

10.1149/1.3207575 ◽

2019 ◽

Vol 25 (8) ◽

pp. 53-63 ◽

Cited By ~ 3

Author(s):

Hideki Matsumura ◽

Keisuke Ohdaira

Keyword(s):

Catalytic Cvd

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Electrostatically-actuated micro cantilevers for electro-mechanical measurement of single-walled carbon nanotubes grown by catalytic CVD

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290618 ◽

2004 ◽

Author(s):

K. Hoshino ◽

Y. Murakami ◽

S. Maruyama ◽

K. Matsumoto ◽

I. Shimoyama

Keyword(s):

Carbon Nanotubes ◽

Single Walled Carbon Nanotubes ◽

Mechanical Measurement ◽

Single Walled Carbon ◽

Electrostatically Actuated ◽

Walled Carbon Nanotubes ◽

Catalytic Cvd

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The mechanism of alumina formation from TMA and molecular oxygen using catalytic-CVD with an iridium catalyzer

Thin Solid Films ◽

10.1016/j.tsf.2005.07.103 ◽

2006 ◽

Vol 501 (1-2) ◽

pp. 35-38 ◽

Cited By ~ 18

Author(s):

Yoh-Ichiro Ogita ◽

Toshiyuki Tomita

Keyword(s):

Molecular Oxygen ◽

Catalytic Cvd

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Catalytic CVD-growth of array of multiwall carbon nanotubes on initially amorphous film Co–Zr–N–O

Diamond and Related Materials ◽

10.1016/j.diamond.2016.01.023 ◽

2016 ◽

Vol 64 ◽

pp. 97-102 ◽

Cited By ~ 8

Author(s):

Dmitry G. Gromov ◽

Sergey Bulyarskii ◽

Alexander Pavlov ◽

Sergey Scorik ◽

Alexey Shulyat'ev ◽

...

Keyword(s):

Carbon Nanotubes ◽

Multiwall Carbon Nanotubes ◽

Amorphous Film ◽

Cvd Growth ◽

Multiwall Carbon ◽

Catalytic Cvd

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Deposition of moisture barrier films by catalytic CVD using hexamethyldisilazane

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.05fm03 ◽

2014 ◽

Vol 53 (5S1) ◽

pp. 05FM03 ◽

Cited By ~ 4

Author(s):

Keisuke Ohdaira ◽

Hideki Matsumura

Keyword(s):

Moisture Barrier ◽

Barrier Films ◽

Catalytic Cvd

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Kinetic Control of Catalytic CVD for High-Quality Graphene at Low Temperatures

ACS Nano ◽

10.1021/nn303674g ◽

2012 ◽

Vol 6 (11) ◽

pp. 9996-10003 ◽

Cited By ~ 124

Author(s):

Robert S. Weatherup ◽

Bruno Dlubak ◽

Stephan Hofmann

Keyword(s):

Low Temperatures ◽

Kinetic Control ◽

High Quality ◽

Catalytic Cvd

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Effect of In Situ Hydrogen Annealing on Dielectric Property of a Low Temperature Silicon Nitride Layer in a Bottom-Gate Nanocrystalline Silicon TFT by Catalytic CVD

ECS Meeting Abstracts ◽

10.1149/ma2010-01/17/967 ◽

2010 ◽

Keyword(s):

Silicon Nitride ◽

Dielectric Property ◽

Low Temperature ◽

Nanocrystalline Silicon ◽

Nitride Layer ◽

Hydrogen Annealing ◽

Silicon Nitride Layer ◽

Bottom Gate ◽

Catalytic Cvd

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Significant enhancement of corrosion resistance of stainless steel with nanostructured carbon coatings by substrate-catalytic CVD

Applied Nanoscience ◽

10.1007/s13204-020-01621-6 ◽

2020 ◽

Author(s):

Shengcheng Shu ◽

Dan Dai ◽

Chih-Yeh Chung ◽

Qilong Yuan ◽

Bo Wang ◽

...

Keyword(s):

Stainless Steel ◽

Corrosion Resistance ◽

Significant Enhancement ◽

Nanostructured Carbon ◽

Carbon Coatings ◽

Catalytic Cvd

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Influence of co-catalyst on growth of carbon nanotubes using alcohol catalytic CVD method

Vacuum ◽

10.1016/j.vacuum.2007.07.012 ◽

2007 ◽

Vol 82 (2) ◽

pp. 134-137 ◽

Cited By ~ 8

Author(s):

T. Ižák ◽

T. Daniš ◽

M. Veselý ◽

M. Marton ◽

M. Michalka

Keyword(s):

Carbon Nanotubes ◽

Co Catalyst ◽

Cvd Method ◽

Catalytic Cvd

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Formation and structure of circular-disc assemblies of double-walled carbon nanotubes from a catalytic CVD reaction

Applied Physics A ◽

10.1007/s00339-008-4629-5 ◽

2008 ◽

Vol 92 (3) ◽

pp. 709-713 ◽

Cited By ~ 3

Author(s):

Xiao-Hua Zhong ◽

Ya-Li Li ◽

Feng Hou ◽

Jian-Min Feng

Keyword(s):

Carbon Nanotubes ◽

Circular Disc ◽

Double Walled Carbon Nanotubes ◽

Walled Carbon Nanotubes ◽

Catalytic Cvd

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409 Investigation of Optimized Condition for Synthesis of Single-Walled Carbon Nanotubes in Alcohol Catalytic CVD

The Proceedings of Conference of Chugoku-Shikoku Branch ◽

10.1299/jsmecs.2007.45.131 ◽

2007 ◽

Vol 2007.45 (0) ◽

pp. 131-132

Author(s):

Takeshi NAKAJIMA ◽

Shuhei INOUE ◽

Kazuya NOMURA ◽

Yoshihiro KIKUCHI

Keyword(s):

Carbon Nanotubes ◽

Single Walled Carbon Nanotubes ◽

Single Walled Carbon ◽

Walled Carbon Nanotubes ◽

Catalytic Cvd

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