CVD Selective Epitaxial Lateral Overgrowth Technique for 3D Stacked SRAM Cell on SOI-Like Silicon Films

2009 ◽  
Vol 12 (10) ◽  
pp. H392 ◽  
Author(s):  
Soon-Moon Jung ◽  
Hoon Lim ◽  
Kinam Kim
Keyword(s):  
Silicon Films ◽  
Epitaxial Lateral Overgrowth ◽  
Lateral Overgrowth ◽  
Sram Cell

Epitaxial lateral overgrowth of amorphous CVD silicon films induced by ion irradiation

1989 ◽  
Vol 43 (1-4) ◽  
pp. 196-199 ◽  
Author(s):  
M. Voelskow ◽  
W. Skorupa ◽  
K. Wollschlaeger ◽  
J. Matthael ◽  
P. Knothe ◽  
...  
Keyword(s):  
Ion Irradiation ◽  
Silicon Films ◽  
Epitaxial Lateral Overgrowth ◽  
Lateral Overgrowth

Study on shallow donor-type impurities of GaN epilayer regrown by epitaxial lateral overgrowth technique

2021 ◽  
Vol 118 (1) ◽  
pp. 012105
Author(s):  
Wenxin Tang ◽  
Fu Chen ◽  
Li zhang ◽  
Kun Xu ◽  
Xuan Zhang ◽  
...  
Keyword(s):  
Shallow Donor ◽  
Epitaxial Lateral Overgrowth ◽  
Lateral Overgrowth ◽  
Donor Type

Trenched epitaxial lateral overgrowth of fast coalesced a-plane GaN with low dislocation density

2006 ◽  
Vol 89 (25) ◽  
pp. 251109 ◽  
Author(s):  
Te-Chung Wang ◽  
Tien-Chang Lu ◽  
Tsung-Shine Ko ◽  
Hao-Chung Kuo ◽  
Min Yu ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Epitaxial Lateral Overgrowth ◽  
Lateral Overgrowth ◽  
Low Dislocation Density

Growth behavior of GaN epilayers on Si(111) grown by GaN nanowires assisted epitaxial lateral overgrowth

CrystEngComm ◽  
2012 ◽  
Vol 14 (17) ◽  
pp. 5558 ◽  
Author(s):  
Bo-Ra Yeom ◽  
R. Navamathavan ◽  
Ji-Hyeon Park ◽  
Yong-Ho Ra ◽  
Cheul-Ro Lee
Keyword(s):  
Growth Behavior ◽  
Epitaxial Lateral Overgrowth ◽  
Gan Nanowires ◽  
Lateral Overgrowth

Epitaxial lateral overgrowth of AlN layers on patterned sapphire substrates

2006 ◽  
Vol 203 (7) ◽  
pp. 1632-1635 ◽  
Author(s):  
K. Nakano ◽  
M. Imura ◽  
G. Narita ◽  
T. Kitano ◽  
Y. Hirose ◽  
...  
Keyword(s):  
Epitaxial Lateral Overgrowth ◽  
Sapphire Substrates ◽  
Lateral Overgrowth ◽  
Patterned Sapphire Substrates

Strain in GaAs layers grown by liquid phase epitaxial lateral overgrowth

1999 ◽  
Vol 86 (4) ◽  
pp. 1965-1969 ◽  
Author(s):  
Z. R. Zytkiewicz ◽  
J. Domagala ◽  
D. Dobosz ◽  
J. Bak-Misiuk
Keyword(s):  
Liquid Phase ◽  
Epitaxial Lateral Overgrowth ◽  
Liquid Phase Epitaxial ◽  
Lateral Overgrowth
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