Multi-Vibrational Hydrogen Release: A Dielectric Breakdown Model for Ultra-thin SiO2/SiON and High-K Stack
Keyword(s):
High K
◽
1989 ◽
Vol 22
(22)
◽
pp. L1061-L1068
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Keyword(s):
1991 ◽
Vol 173
(1-2)
◽
pp. 1-21
◽
2005 ◽
Vol 132
(4)
◽
pp. 311-327
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