Evolution of Wafer Inspection and Review Methodology

Ellis Chang; Allen Park

doi:10.1149/1.3096447

Evolution of Wafer Inspection and Review Methodology

ECS Transactions ◽

10.1149/1.3096447 ◽

2019 ◽

Vol 18 (1) ◽

pp. 183-186

Author(s):

Ellis Chang ◽

Allen Park

Keyword(s):

Wafer Inspection

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Strain-free wafer inspection

III-Vs Review ◽

10.1016/s0961-1290(96)80209-2 ◽

1996 ◽

Vol 9 (5) ◽

pp. 73

Keyword(s):

Wafer Inspection

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Initial results on the development of a new wafer inspection paradigm

6th IEEE Southwest Symposium on Image Analysis and Interpretation, 2004. ◽

10.1109/iai.2004.1300958 ◽

2004 ◽

Author(s):

T.A. El Doker ◽

J. King ◽

D.R. Scott

Keyword(s):

Wafer Inspection ◽

Initial Results

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Advanced interconnect process development utilizing wafer inspection with "on-the-fly" automatic defect classification

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) ◽

10.1109/asmc.1999.798239 ◽

2003 ◽

Cited By ~ 2

Author(s):

A. Skumanich ◽

J. Boyle ◽

D. Brown

Keyword(s):

Process Development ◽

Defect Classification ◽

Wafer Inspection

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Enhanced capture rate for haze defects in production wafer inspection

10.1117/12.846718 ◽

2010 ◽

Author(s):

Ditza Auerbach ◽

Adi Shulman ◽

Moshe Rozentsvige

Keyword(s):

Capture Rate ◽

Wafer Inspection

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An Intelligent Robotic Vision System For Wafer Inspection In An Industrial Environment

10.1109/iecon.1988.662381 ◽

2005 ◽

Author(s):

D.P. Mital ◽

E.K. Teoh ◽

I.N. Yong

Keyword(s):

Vision System ◽

Industrial Environment ◽

Robotic Vision ◽

Wafer Inspection

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Filter design methodology for defect detection in wafer inspection

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589714 ◽

1997 ◽

Vol 15 (6) ◽

pp. 2718 ◽

Cited By ~ 2

Author(s):

Robert J. Socha

Keyword(s):

Defect Detection ◽

Design Methodology ◽

Filter Design ◽

Wafer Inspection

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Novel Full Wafer Inspection Technology for Non-Visual Residue Defects

Solid State Phenomena - Ultra Clean Processing of Semiconductor Surfaces VIII ◽

10.4028/3-908451-46-9.289 ◽

2007 ◽

pp. 289-292 ◽

Cited By ~ 1

Author(s):

Robert Bryant ◽

Joel Hickson ◽

Jeff Hawthorne

Keyword(s):

Wafer Inspection

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Applying Regional Level-Set Formulation to Postsawing Four-Element LED Wafer Inspection

IEEE Transactions on Systems Man and Cybernetics Part C (Applications and Reviews) ◽

10.1109/tsmcc.2010.2088119 ◽

2011 ◽

Vol 41 (6) ◽

pp. 842-853 ◽

Cited By ~ 3

Author(s):

Chun-Hsi Li ◽

Chuan-Yu Chang ◽

MuDer Jeng

Keyword(s):

Level Set ◽

Regional Level ◽

Wafer Inspection ◽

Level Set Formulation

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Application of intentional defect arrays for assessing wafer inspection tool capabilities

10.1117/12.473494 ◽

2002 ◽

Cited By ~ 1

Author(s):

Abbie L. Warrick ◽

Amy B. Engbrecht ◽

Richard J. Jarvis

Keyword(s):

Wafer Inspection

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Wafer inspection for defects

Microelectronics Reliability ◽

10.1016/0026-2714(86)90161-7 ◽

1986 ◽

Vol 26 (4) ◽

pp. 794

Keyword(s):

Wafer Inspection

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