Effects of Substrate Cooling on the Ionic Conductivity of Ta2O5 Solid-Electrolyte Thin Films Prepared by Reactive Sputtering Using H2O Gas
2009 ◽
Vol 11
(17)
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pp. 3043
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Keyword(s):
Keyword(s):
2020 ◽
Vol 140
(11)
◽
pp. 305-308