Characterization of Si1-xGex Epilayer Thickness, Ge and Doped Boron Concentration with UV-Vis-IR Spectroscopic Ellipsometer
2015 ◽
Vol 2
(2)
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pp. 70-73
1976 ◽
Vol 65
(8)
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pp. 1258-1260
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2017 ◽
Vol 2
(01)
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pp. 8-14
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2006 ◽
Vol 19
(8-9)
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pp. 540-551
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2016 ◽
Vol 71
(1)
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pp. 51-55
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2018 ◽
Vol 20
(44)
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pp. 28319-28330
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