In-Situ Monitoring of the Internal Stress Evolution during Thin Film Anodising

2019 ◽  
Vol 11 (24) ◽  
pp. 35-42
Author(s):  
Joris Proost ◽  
Jean-François Vanhumbeeck ◽  
Quentin Van Overmeere
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
In Situ Monitoring ◽  
Stress Evolution

Soft x-ray spectrometer for in situ monitoring of thin-film growth

1994 ◽  
Author(s):  
Per Skytt ◽  
Carl J. Englund ◽  
Nial Wassdahl ◽  
Derrick C. Mancini ◽  
Joseph Nordgren
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Monitoring ◽  
X Ray

In-situ monitoring of hydride formation in Pd thin film systems

2010 ◽  
Vol 35 (18) ◽  
pp. 9888-9892 ◽  
Author(s):  
R. Delmelle ◽  
G. Bamba ◽  
J. Proost
Keyword(s):  
Thin Film ◽  
In Situ Monitoring ◽  
Hydride Formation

scholarly journals Measurements Of Stress Evolution During Thin Film Deposition

1996 ◽  
Vol 428 ◽  
Author(s):  
E. Chason ◽  
J. A. Floro
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Film Stress ◽  
Radius Of Curvature ◽  
Stress Evolution ◽  
Rectangular Array ◽  
Thin Film Stress ◽  
Ccd Detector

AbstractWe have developed a technique for measuring thin film stress during growth by monitoring the wafer curvature. By measuring the deflection of multiple parallel laser beams with a CCD detector, the sensitivity to vibration is reduced and a radius of curvature limit of 4 km has been obtained in situ. This technique also enables us to obtain a 2-dimensional profile of the surface curvature from the simultaneous reflection of a rectangular array of beams. Results from the growth of SiGe alloy films are presented to demonstrate the unique information that can be obtained during growth.

Optical fiber-based sensor for in situ monitoring of cadmium sulfide thin-film growth

2013 ◽  
Vol 38 (24) ◽  
pp. 5385 ◽  
Author(s):  
Farzia Karim ◽  
Tanujjal Bora ◽  
Mayur B. Chaudhari ◽  
Khaled Habib ◽  
Waleed S. Mohammed ◽  
...  
Keyword(s):  
Thin Film ◽  
Optical Fiber ◽  
Cadmium Sulfide ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Monitoring

scholarly journals In-situ monitoring of molecular vibrations of two organic semiconductors in photovoltaic blends and their impact on thin film morphology

2013 ◽  
Vol 102 (17) ◽  
pp. 173302 ◽  
Author(s):  
Wing C. Tsoi ◽  
Weimin Zhang ◽  
Joseph Razzell Hollis ◽  
Minwon Suh ◽  
Martin Heeney ◽  
...  
Keyword(s):  
Thin Film ◽  
Organic Semiconductors ◽  
In Situ Monitoring ◽  
Film Morphology ◽  
Molecular Vibrations
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