Impact of Carbon Incorporation on the Effective Work Function of WN and TaN Metal Gate Electrodes

2008 ◽  
Vol 11 (7) ◽  
pp. H182 ◽  
Author(s):  
H. N. Alshareef ◽  
M. Quevedo-Lopez ◽  
H. C. Wen ◽  
C. Huffman ◽  
M. El-Bouanani ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Carbon Incorporation ◽  
Effective Work ◽  
Effective Work Function ◽  
Gate Electrodes

Effective Work-Function Modulation by Aluminum-Ion Implantation for Metal-Gate Technology $(\hbox{Poly-Si/TiN/SiO}_{2})$

2007 ◽  
Vol 28 (12) ◽  
pp. 1089-1091 ◽  
Author(s):  
R. Singanamalla ◽  
H. Y. Yu ◽  
B. Van Daele ◽  
S. Kubicek ◽  
K. De Meyer
Keyword(s):  
Ion Implantation ◽  
Work Function ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
Aluminum Ion

Investigating doping effects on high-κ metal gate stack for effective work function engineering

2013 ◽  
Vol 88 ◽  
pp. 21-26 ◽  
Author(s):  
C. Leroux ◽  
S. Baudot ◽  
M. Charbonnier ◽  
A. Van Der Geest ◽  
P. Caubet ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Gate Stack ◽  
Effective Work ◽  
Effective Work Function ◽  
Doping Effects

Work function and thermal stability of Ti1−xAlxNy for dual metal gate electrodes

2002 ◽  
Vol 81 (22) ◽  
pp. 4192-4194 ◽  
Author(s):  
Tae-Ho Cha ◽  
Dae-Gyu Park ◽  
Tae-Kyun Kim ◽  
Se-Aug Jang ◽  
In-Seok Yeo ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Work Function ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes ◽  
Dual Metal ◽  
Thermal Stability Of

Influence of oxygen diffusion through capping layers of low work function metal gate electrodes

2006 ◽  
Vol 27 (4) ◽  
pp. 228-230 ◽  
Author(s):  
Bei Chen ◽  
R. Jha ◽  
H. Lazar ◽  
N. Biswas ◽  
Jaehoon Lee ◽  
...  
Keyword(s):  
Work Function ◽  
Oxygen Diffusion ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes

Thermally stable high effective work function TaCN thin films for metal gate electrode applications

2009 ◽  
Vol 105 (5) ◽  
pp. 053516 ◽  
Author(s):  
C. Adelmann ◽  
J. Meersschaut ◽  
L.-Å. Ragnarsson ◽  
T. Conard ◽  
A. Franquet ◽  
...  
Keyword(s):  
Thin Films ◽  
Work Function ◽  
Thermally Stable ◽  
Gate Electrode ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function

Application of group electronegativity concepts to the effective work functions of metal gate electrodes on high-κ gate oxides

2007 ◽  
Vol 84 (9-10) ◽  
pp. 2196-2200 ◽  
Author(s):  
J.K. Schaeffer ◽  
D.C. Gilmer ◽  
C. Capasso ◽  
S. Kalpat ◽  
B. Taylor ◽  
...  
Keyword(s):  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Oxides ◽  
Effective Work ◽  
Gate Electrodes ◽  
Group Electronegativity ◽  
Work Functions

Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices

2017 ◽  
Vol 72 ◽  
pp. 80-84 ◽  
Author(s):  
Shimpei Yamaguchi ◽  
Zeynel Bayindir ◽  
Xiaoli He ◽  
Suresh Uppal ◽  
Purushothaman Srinivasan ◽  
...  
Keyword(s):  
Work Function ◽  
Control Technique ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
High K ◽  
P Type
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