Study of Mode Transitions in Inductively Coupled Plasmas

2019 ◽  
Vol 4 (1) ◽  
pp. 553-562
Author(s):  
A. M. Daltrini ◽  
S. A. Moshkalyov ◽  
M. J. Monteiro ◽  
M. Machida ◽  
E. Besseler
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Mode Transitions ◽  
Coupled Plasmas

Mode transitions and hysteresis in inductively coupled plasmas

2007 ◽  
Vol 101 (7) ◽  
pp. 073309 ◽  
Author(s):  
A. M. Daltrini ◽  
S. A. Moshkalev ◽  
M. J. R. Monteiro ◽  
E. Besseler ◽  
A. Kostryukov ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Mode Transitions ◽  
Coupled Plasmas

Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas

2015 ◽  
Vol 22 (4) ◽  
pp. 043508 ◽  
Author(s):  
Hui-Jing Xu ◽  
Shu-Xia Zhao ◽  
Yu-Ru Zhang ◽  
Fei Gao ◽  
Xue-Chun Li ◽  
...  
Keyword(s):  
Equivalent Circuit ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Mode Transitions ◽  
Coupled Plasmas

Dynamics of mode transitions in inductively-coupled plasmas

2002 ◽  
Vol 30 (1) ◽  
pp. 128-129 ◽  
Author(s):  
K. Ostrikov ◽  
E. Tsakadze ◽  
Jiang Ning ◽  
Z. Tsakadze ◽  
Long Jidong ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Mode Transitions ◽  
Coupled Plasmas

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas
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