Electrical Characterization Methodologies for the Assessment of High-k Gate Dielectric Stacks

2019 ◽  
Vol 11 (4) ◽  
pp. 335-346 ◽  
Author(s):  
Chadwin D. Young ◽  
Gennadi Bersuker ◽  
Dawei Heh ◽  
Arnost Neugroschel ◽  
Rino Choi ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Electrical Characterization ◽  
High K ◽  
High K Gate Dielectric

Electrical Characterization of Capacitors with AVD-Deposited Hafnium Silicates as High-k Gate Dielectric

2005 ◽  
Vol 152 (11) ◽  
pp. F185 ◽  
Author(s):  
S. Van Elshocht ◽  
U. Weber ◽  
T. Conard ◽  
V. Kaushik ◽  
M. Houssa ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Electrical Characterization ◽  
High K ◽  
High K Gate Dielectric

Experimental observations of the thermal stability of high-k gate dielectric materials on silicon

2002 ◽  
Vol 303 (1) ◽  
pp. 54-63 ◽  
Author(s):  
P.S. Lysaght ◽  
P.J. Chen ◽  
R. Bergmann ◽  
T. Messina ◽  
R.W. Murto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Gate Dielectric ◽  
Dielectric Materials ◽  
High K ◽  
Thermal Stability Of ◽  
High K Gate Dielectric
Sign in / Sign up

Export Citation Format

Share Document