Aberration-corrected Scanning Transmission Electron Microscopy for Atomic-scale Characterization of Semiconductor Devices

2019 ◽  
Vol 11 (3) ◽  
pp. 225-231
Author(s):  
Klaus Van Benthem ◽  
Stephen J Pennycook
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Atomic Scale ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Scale Characterization ◽  
Aberration Corrected

scholarly journals Atomic-Scale Characterization of Metals and Alloys Using Spherical-Aberration Corrected Scanning Transmission Electron Microscopy

2006 ◽  
Vol 12 (S02) ◽  
pp. 1344-1345
Author(s):  
D Williams ◽  
M Watanabe
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Spherical Aberration ◽  
Atomic Scale ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Scale Characterization ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

scholarly journals Atomic-Scale Analysis of Chemical Bonding of Delaminated Graphene at Faceted SiC by Aberration-Corrected Scanning Transmission Electron Microscopy

2013 ◽  
Vol 19 (S2) ◽  
pp. 1238-1239
Author(s):  
G. Nicotra ◽  
Q.M. Ramasse ◽  
I. Deretzis ◽  
C. Bongiorno ◽  
C. Spinella ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Chemical Bonding ◽  
Scanning Transmission Electron Microscopy ◽  
Atomic Scale ◽  
Scale Analysis ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Atomic-Scale Imaging and Spectroscopy for In Situ Liquid Scanning Transmission Electron Microscopy

2012 ◽  
Vol 18 (3) ◽  
pp. 621-627 ◽  
Author(s):  
Katherine L. Jungjohann ◽  
James E. Evans ◽  
Jeffery A. Aguiar ◽  
Ilke Arslan ◽  
Nigel D. Browning
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Path Length ◽  
Atomic Scale ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Aberration Corrected

AbstractObservation of growth, synthesis, dynamics, and electrochemical reactions in the liquid state is an important yet largely unstudied aspect of nanotechnology. The only techniques that can potentially provide the insights necessary to advance our understanding of these mechanisms is simultaneous atomic-scale imaging and quantitative chemical analysis (through spectroscopy) under environmental conditions in the transmission electron microscope. In this study we describe the experimental and technical conditions necessary to obtain electron energy loss (EEL) spectra from a nanoparticle in colloidal suspension using aberration-corrected scanning transmission electron microscopy (STEM) combined with the environmental liquid stage. At a fluid path length below 400 nm, atomic resolution images can be obtained and simultaneous compositional analysis can be achieved. We show that EEL spectroscopy can be used to quantify the total fluid path length around the nanoparticle and demonstrate that characteristic core-loss signals from the suspended nanoparticles can be resolved and analyzed to provide information on the local interfacial chemistry with the surrounding environment. The combined approach using aberration-corrected STEM and EEL spectra with the in situ fluid stage demonstrates a plenary platform for detailed investigations of solution-based catalysis.

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