Optical and Electrical Properties of SiC Films Prepared in a Microwave Discharge
1968 ◽
Vol 115
(10)
◽
pp. 1090
◽
Keyword(s):
1995 ◽
Vol 29
(1-3)
◽
pp. 160-164
◽
Keyword(s):
2003 ◽
Vol 14
(0)
◽
pp. 149-153
2019 ◽
Vol 11
(5)
◽
pp. 05025-1-05025-6
2019 ◽
pp. 1255-1265
Keyword(s):