Gas Phase and Surface Chemical Kinetics in Silicon Chemical Vapor deposition

2019 ◽  
Vol 2 (7) ◽  
pp. 107-119 ◽  
Author(s):  
Mitsuo Koshi ◽  
Keiji Matsumoto
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Chemical Kinetics ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Surface Chemical

Chemical Kinetics of Photoinduced Chemical Vapor Deposition: Silica Coating of Gas-Phase Nanoparticles

2011 ◽  
Vol 116 (1) ◽  
pp. 104-114 ◽  
Author(s):  
Adam M. Boies ◽  
Steven Calder ◽  
Pulkit Agarwal ◽  
Pingyan Lei ◽  
Steven L. Girshick
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Chemical Kinetics ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Silica Coating ◽  
Kinetics Of

scholarly journals Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

2017 ◽  
Vol 121 (47) ◽  
pp. 26465-26471 ◽  
Author(s):  
Mewlude Imam ◽  
Laurent Souqui ◽  
Jan Herritsch ◽  
Andreas Stegmüller ◽  
Carina Höglund ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition ◽  
Gas Phase Chemistry ◽  
Phase Chemistry

scholarly journals Gas-phase aluminium acetylacetonate decomposition: Revision of the current mechanism by VUV synchrotron radiation

2021 ◽  
Author(s):  
Sebastian Grimm ◽  
Seung-Jin Baik ◽  
Patrick Hemberger ◽  
Andras Bodi ◽  
Andreas Kempf ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Synchrotron Radiation ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Aluminium Oxide ◽  
Chemical Vapor ◽  
Phase Decomposition ◽  
Common Precursor ◽  
Current Mechanism

Although aluminium acetylacetonate, Al(C5H7O2)3, is a common precursor for chemical vapor deposition (CVD) of aluminium oxide, its gas phase decomposition is not very well investigated. Here, we studied its thermal...

Modeling analysis of gas phase nucleation in silicon carbide chemical vapor deposition

1999 ◽  
Vol 61-62 ◽  
pp. 176-178 ◽  
Author(s):  
A.N Vorob’ev ◽  
A.E Komissarov ◽  
A.S Segal ◽  
Yu.N Makarov ◽  
S.Yu Karpov ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Modeling Analysis ◽  
Phase Nucleation
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