Local Strain Characterization on Strained-Si/SiGe Heterostructures with Convergent Beam Electron Diffraction and Finite Element Simulation

2019 ◽  
Vol 3 (7) ◽  
pp. 333-338
Author(s):  
Wenjun Zhao ◽  
Gerd Duscher ◽  
Mohammed Zikry ◽  
George Rongonyi
Keyword(s):  
Finite Element ◽  
Electron Diffraction ◽  
Finite Element Simulation ◽  
Local Strain ◽  
Convergent Beam Electron Diffraction ◽  
Strained Si ◽  
Beam Electron ◽  
Strain Characterization ◽  
Element Simulation ◽  
Convergent Beam

Measurement of Local Strain in Thin Aluminium Interconnects Using Convergent Beam Electron Diffraction (CBED)

1999 ◽  
Vol 594 ◽  
Author(s):  
S. Krämer ◽  
J. Mayer
Keyword(s):  
Electron Diffraction ◽  
Axial Strain ◽  
Local Strain ◽  
Convergent Beam Electron Diffraction ◽  
Elastic Behaviour ◽  
Large Strains ◽  
Beam Electron ◽  
Single Grain ◽  
Convergent Beam ◽  
Line Positions

AbstractEnergy filtered convergent beam electron diffraction (CBED) was used to investigate localized strain in aluminium interconnects. An analysis of the higher order Laue zone (HOLZ) line positions in CBED patterns makes it possible to measure the lattice strain with high accuracy (∼10−4) and high spatial resolution (10 to 100 nm). The strain development in a single grain was measured during thermal cycling between −170°C and + 100°C. The grain showed reversible, elastic behaviour over the whole temperature range building up large strains at low temperatures. By comparing with finite element simulations, a detailed understanding of the tri-axial strain state could be achieved.

Direct Comparison of Convergent Beam Electron Diffraction and Geometric Phase Analysis for Local Strain Measurement

2010 ◽  
Vol 16 (S2) ◽  
pp. 742-743
Author(s):  
D Diercks ◽  
G Lian ◽  
J Chung ◽  
M Kaufman
Keyword(s):  
Electron Diffraction ◽  
Phase Analysis ◽  
Geometric Phase ◽  
Strain Measurement ◽  
Local Strain ◽  
Convergent Beam Electron Diffraction ◽  
Beam Electron ◽  
Geometric Phase Analysis ◽  
Convergent Beam

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

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