Analysis of local strain in aluminum interconnects by convergent beam electron diffraction

1999 ◽  
Author(s):  
Stephan Krämer ◽  
Joachim Mayer
Keyword(s):  
Electron Diffraction ◽  
Local Strain ◽  
Convergent Beam Electron Diffraction ◽  
Beam Electron ◽  
Convergent Beam ◽  
Aluminum Interconnects

Measurement of Local Strain in Thin Aluminium Interconnects Using Convergent Beam Electron Diffraction (CBED)

1999 ◽  
Vol 594 ◽  
Author(s):  
S. Krämer ◽  
J. Mayer
Keyword(s):  
Electron Diffraction ◽  
Axial Strain ◽  
Local Strain ◽  
Convergent Beam Electron Diffraction ◽  
Elastic Behaviour ◽  
Large Strains ◽  
Beam Electron ◽  
Single Grain ◽  
Convergent Beam ◽  
Line Positions

AbstractEnergy filtered convergent beam electron diffraction (CBED) was used to investigate localized strain in aluminium interconnects. An analysis of the higher order Laue zone (HOLZ) line positions in CBED patterns makes it possible to measure the lattice strain with high accuracy (∼10−4) and high spatial resolution (10 to 100 nm). The strain development in a single grain was measured during thermal cycling between −170°C and + 100°C. The grain showed reversible, elastic behaviour over the whole temperature range building up large strains at low temperatures. By comparing with finite element simulations, a detailed understanding of the tri-axial strain state could be achieved.

Analysis of Local Strain in Aluminum Interconnects by Convergent Beam Electron Diffraction

2003 ◽  
Vol 9 (5) ◽  
pp. 390-398 ◽  
Author(s):  
Stephan Krämer ◽  
Cynthia A. Volkert ◽  
Joachim Mayer
Keyword(s):  
Electron Diffraction ◽  
Strain State ◽  
Strain Analysis ◽  
Local Stress ◽  
Convergent Beam Electron Diffraction ◽  
Elastic Behavior ◽  
Free Standing ◽  
Beam Electron ◽  
Convergent Beam ◽  
Aluminum Interconnects

Energy filtered convergent beam electron diffraction was used to investigate localized strain in aluminum interconnects. By analyzing the position of higher order Laue zone lines, it is possible to measure the three-dimensional lattice strain with high accuracy (∼10−4) and high spatial resolution (10 to 100 nm). In the present article, important details of the strain analysis procedure are outlined. Subsequently, results of measurements of the local variation of thermal strains in narrow, free-standing interconnects are presented. The strain development in single grains during thermal cycling between −170°C and +100°C was measured in situ and local stress variations along the interconnect were investigated. The interconnects show reversible elastic behavior over the whole temperature range, leading to large stresses at low temperatures. The strain state varies locally within single grains, as well as from grain to grain, by as much as 50% in both types of samples. By comparing the experimental findings with elastic finite element modeling, a detailed understanding of the triaxial strain state could be achieved.

Direct Comparison of Convergent Beam Electron Diffraction and Geometric Phase Analysis for Local Strain Measurement

2010 ◽  
Vol 16 (S2) ◽  
pp. 742-743
Author(s):  
D Diercks ◽  
G Lian ◽  
J Chung ◽  
M Kaufman
Keyword(s):  
Electron Diffraction ◽  
Phase Analysis ◽  
Geometric Phase ◽  
Strain Measurement ◽  
Local Strain ◽  
Convergent Beam Electron Diffraction ◽  
Beam Electron ◽  
Geometric Phase Analysis ◽  
Convergent Beam

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Symmetries and Extinction Rules in CBED

1982 ◽  
Vol 40 ◽  
pp. 684-685
Author(s):  
K. Ishizuka
Keyword(s):  
Electron Diffraction ◽  
Incident Beam ◽  
Convergent Beam Electron Diffraction ◽  
Beam Direction ◽  
Beam Electron ◽  
Convergent Beam

The technique of convergent-beam electron diffraction (CBED) has been established. However there is a distinct discrepancy concerning the CBED pattern symmetries associated with translation symmetries parallel to the incident beam direction: Buxton et al. assumed no detectable effects of translation components, while Goodman predicted no associated symmetries. In this report a procedure used by Gjønnes & Moodie1 to obtain dynamical extinction rules will be extended in order to derive the CBED pattern symmetries as well as the dynamical extinction rules.

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