Transmission Electron Microscopic Study of the Morphology of Oxygen Precipitates and of Chromium Precipitation during Intrinsic Gettering in Czochralski‐Grown Silicon: Influence of Lamp Pulse Annealings

1993 ◽  
Vol 140 (2) ◽  
pp. 495-500 ◽  
Author(s):  
S. Krieger‐Kaddour ◽  
N. ‐E. Chabane‐Sari ◽  
D. Barbier
1992 ◽  
Vol 48 (8) ◽  
pp. 396-398
Author(s):  
Akira Tanaka ◽  
Masa-aki Kakimoto ◽  
Koji Hirano ◽  
Hiroyuki Fukuda ◽  
Toshinari Araki ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document