Study of Inhibition Characteristics of Slurry Additives in Copper CMP Using Force Spectroscopy

2019 ◽  
Vol 2 (2) ◽  
pp. 515-522 ◽  
Author(s):  
Manish K. Keswani ◽  
Hyosang Lee ◽  
Suryadevara Babu ◽  
Udaya Patri ◽  
Youngki Hong ◽  
...  
Keyword(s):  
Force Spectroscopy ◽  
Copper Cmp

scholarly journals Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy

2007 ◽  
Vol 8 (1) ◽  
pp. 5-10
Author(s):  
Hyo-Sang Lee ◽  
Ara Philipossian ◽  
Suryadevara V. Babu ◽  
Udaya B. Patri ◽  
Young-Ki Hong ◽  
...  
Keyword(s):  
Force Spectroscopy ◽  
Copper Cmp

Root Cause Analyses of Metal Bridging for Copper Damascene Process

2005 ◽  
Author(s):  
Z. G. Song ◽  
S. P. Neo ◽  
S. K. Loh ◽  
C. K. Oh
Keyword(s):  
Failure Mechanisms ◽  
Copper Corrosion ◽  
Microelectronic Device ◽  
Root Cause ◽  
Damascene Process ◽  
New Process ◽  
Copper Cmp

Abstract New process will introduce new failure mechanisms during microelectronic device manufacturing. Even if the same defect, its root causes can be different for different processes. For aluminum(Al)-tungsten(W) metallization, the root cause of metal bridging is quite simple and mostly it is blocked etch or under-etch. But, for copper damascene process, the root causes of metal bridging are complicated. This paper has discussed the various root causes of metal bridging for copper damascene process, such as those related to litho-etch issue, copper CMP issue, copper corrosion issue and so on.

Dysfunction of endothelial cells exposed to nanomaterials assessed by atomic force spectroscopy

Micron ◽  
2021 ◽  
Vol 145 ◽  
pp. 103062
Author(s):  
Agnieszka Maria Kolodziejczyk ◽  
Paulina Sokolowska ◽  
Aleksandra Zimon ◽  
Magdalena Grala ◽  
Marcin Rosowski ◽  
...  
Keyword(s):  
Endothelial Cells ◽  
Force Spectroscopy ◽  
Atomic Force Spectroscopy ◽  
Atomic Force

scholarly journals Single Molecule Force Spectroscopy of Siloxanes

2021 ◽  
Vol 714 (3) ◽  
pp. 032023
Author(s):  
Ling Chen ◽  
Liya Yang ◽  
Chunxia Wang ◽  
Ting Zhu
Keyword(s):  
Single Molecule ◽  
Force Spectroscopy ◽  
Single Molecule Force Spectroscopy

scholarly journals Determination of the molar mass of surface-grafted weak polyelectrolyte brushes using force spectroscopy

Polymer ◽  
2015 ◽  
Vol 67 ◽  
pp. 111-117 ◽  
Author(s):  
Ateyyah AL-Baradi ◽  
Michael R. Tomlinson ◽  
Zhenyu J. Zhang ◽  
Mark Geoghegan
Keyword(s):  
Molar Mass ◽  
Force Spectroscopy ◽  
Polyelectrolyte Brushes
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