Properties of Sn‐Doped Indium Oxide Coatings Deposited on Polyester Film by High Rate Reactive Sputtering

1979 ◽  
Vol 126 (4) ◽  
pp. 691-694 ◽  
Author(s):  
Kuniyoshi Itoyama
Keyword(s):  
Indium Oxide ◽  
Reactive Sputtering ◽  
High Rate ◽  
Oxide Coatings ◽  
Polyester Film

High Rate Deposition of Al-doped ZnO (AZO) by Reactive Sputtering (1); Unipolar Pulsing with Plasma Emission Control

2008 ◽  
Author(s):  
Yuzo Shigesato ◽  
Kento Hirohata ◽  
Yasutaka Nishi ◽  
Nobuto Oka ◽  
Yasushi Sato ◽  
...  
Keyword(s):  
Emission Control ◽  
Reactive Sputtering ◽  
High Rate ◽  
Plasma Emission ◽  
Doped Zno

High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method

2011 ◽  
Vol 520 (4) ◽  
pp. 1178-1181 ◽  
Author(s):  
Yu Muto ◽  
Nobuto Oka ◽  
Naoki Tsukamoto ◽  
Yoshinori Iwabuchi ◽  
Hidefumi Kotsubo ◽  
...  
Keyword(s):  
Control Method ◽  
Impedance Control ◽  
Reactive Sputtering ◽  
High Rate

High Rate Reactive Sputtering onto Flexible Polymer Sheet

1989 ◽  
pp. 45-54 ◽  
Author(s):  
R. P. Howson ◽  
A. G. Spencer ◽  
K. Oka ◽  
R. W. Lewin
Keyword(s):  
Reactive Sputtering ◽  
High Rate ◽  
Polymer Sheet ◽  
Flexible Polymer

Indium oxide-based transparent conductive films deposited by reactive sputtering using alloy targets

2017 ◽  
Vol 56 (4) ◽  
pp. 045503 ◽  
Author(s):  
Yusuke Miyazaki ◽  
Eri Maruyama ◽  
Junjun Jia ◽  
Hironobu Machinaga ◽  
Yuzo Shigesato
Keyword(s):  
Indium Oxide ◽  
Reactive Sputtering ◽  
Transparent Conductive Films ◽  
Conductive Films
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