Ellipsometric Characterization of Si Surface Damage Induced by Sputter Etching
1983 ◽
Vol 130
(5)
◽
pp. 1201-1206
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1990 ◽
Vol 5
(2)
◽
pp. 285-289
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Keyword(s):
1986 ◽
Vol 133
(4)
◽
pp. 784-787
◽
2019 ◽
Vol 944
◽
pp. 828-834
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