Thermal Oxidation of Silicon in Dry Oxygen: Accurate Determination of the Kinetic Rate Constants
1985 ◽
Vol 132
(7)
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pp. 1745-1753
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Keyword(s):
Keyword(s):
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1971 ◽
Vol 9
(9)
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pp. 2429-2438
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2013 ◽
Vol 35
(6)
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pp. 423-437
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Keyword(s):
2019 ◽
Vol 220
(15)
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pp. 1900163
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2017 ◽
Vol 75
(12)
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pp. 2737-2746
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Keyword(s):
1965 ◽
Vol 27
(3)
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pp. 253-263
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