Large‐Area Ion Doping Technique with Bucket‐Type Ion Source for Polycrystalline Silicon Films

1990 ◽  
Vol 137 (11) ◽  
pp. 3522-3526 ◽  
Author(s):  
G. Kawachi ◽  
T. Aoyama ◽  
K. Miyata ◽  
Y. Ohno ◽  
A. Mimura ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Ion Source ◽  
Silicon Films ◽  
Large Area ◽  
Ion Doping ◽  
Doping Technique ◽  
Polycrystalline Silicon Films

Structural Properties of Polycrystalline Silicon Films Formed by Pulsed Rapid Thermal Processing

1998 ◽  
Vol 507 ◽  
Author(s):  
Yongqian Wang ◽  
Xianbo Liao ◽  
Hongwei Diao ◽  
Jie He ◽  
Zhixun Ma ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Thermal Processing ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Low Cost ◽  
Rapid Thermal Processing ◽  
Silicon Films ◽  
Large Area ◽  
Small Lattice ◽  
Polycrystalline Silicon Films

ABSTRACTA novel pulsed rapid thermal processing (PRTP) method has been used for realizing the solid-phase crystallization of amorphous silicon films prepared by PECVD. The microstructure and surface morphology of the crystallized films are investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicate that this PRTP is a suitable postcrystallization technique for fabricating large-area polycrystalline silicon films with good structural qualities such as large grain size, small lattice microstain and smooth surface morphology on low-cost substrate.

Interface morphology of thermal oxide grown on polycrystalline silicon by different processes

1992 ◽  
Vol 50 (2) ◽  
pp. 1396-1397
Author(s):  
H. Yen ◽  
E. P. Kvam ◽  
R. Bashir ◽  
S. Venkatesan ◽  
G. W. Neudeck
Keyword(s):  
Integrated Circuits ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Interface Morphology ◽  
Oxide Interface ◽  
Poly Silicon ◽  
Thermal Oxide ◽  
Grain Orientations ◽  
Polycrystalline Silicon Films ◽  
P Type

Polycrystalline silicon, when highly doped, is commonly used in microelectronics applications such as gates and interconnects. The packing density of integrated circuits can be enhanced by fabricating multilevel polycrystalline silicon films separated by insulating SiO2 layers. It has been found that device performance and electrical properties are strongly affected by the interface morphology between polycrystalline silicon and SiO2. As a thermal oxide layer is grown, the poly silicon is consumed, and there is a volume expansion of the oxide relative to the atomic silicon. Roughness at the poly silicon/thermal oxide interface can be severely deleterious due to stresses induced by the volume change during oxidation. Further, grain orientations and grain boundaries may alter oxidation kinetics, which will also affect roughness, and thus stress.Three groups of polycrystalline silicon films were deposited by LPCVD after growing thermal oxide on p-type wafers. The films were doped with phosphorus or arsenic by three different methods.

Structure of Annealed Polycrystalline Silicon Films. I. Recrystallization

1986 ◽  
Vol 98 (2) ◽  
pp. 383-390 ◽  
Author(s):  
F. L. Edelman ◽  
J. Heydenreich ◽  
D. Hoehl ◽  
J. Matthäi ◽  
I. Melnik ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Stresses in thin polycrystalline silicon films

1988 ◽  
Vol 162 ◽  
pp. 365-374 ◽  
Author(s):  
V.M. Koleshko ◽  
V.F. Belitsky ◽  
I.V. Kiryushin
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films

Fast and non-destructive assessment of epitaxial quality of polycrystalline silicon films on glass by optical measurements

2004 ◽  
Vol 265 (1-2) ◽  
pp. 168-173 ◽  
Author(s):  
Axel Straub ◽  
Per I. Widenborg ◽  
Alistair Sproul ◽  
Yidan Huang ◽  
Nils-Peter Harder ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Optical Measurements ◽  
Polycrystalline Silicon Films ◽  
Non Destructive

Microstructure of polycrystalline silicon films obtained by combined furnace and laser annealing

1995 ◽  
Vol 66 (11) ◽  
pp. 1394-1396 ◽  
Author(s):  
R. Carluccio ◽  
J. Stoemenos ◽  
G. Fortunato ◽  
D. B. Meakin ◽  
M. Bianconi
Keyword(s):  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Silicon Films ◽  
Polycrystalline Silicon Films
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