Compositional Analysis and Capacitance‐Voltage Properties of TiO2 Films by Low Pressure Metal‐Organic Chemical Vapor Deposition

1992 ◽  
Vol 139 (11) ◽  
pp. 3284-3288 ◽  
Author(s):  
Tae‐Kyung Won ◽  
Soon‐Gill Yoon ◽  
Ho‐Gi Kim
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