Characterization of Reactively Sputtered Silicon Nitride

K. Matsuzaki; A. Hirabayashi; M. Saga

doi:10.1149/1.2069063

Characterization of Reactively Sputtered Silicon Nitride

Journal of The Electrochemical Society ◽

10.1149/1.2069063 ◽

1992 ◽

Vol 139 (11) ◽

pp. 3259-3263 ◽

Cited By ~ 6

Author(s):

K. Matsuzaki ◽

A. Hirabayashi ◽

M. Saga

Keyword(s):

Silicon Nitride

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MATERIAL PROPERTIES ANALYSIS OF CIRCUIT SUBASSEMBLIES: QUANTITATIVE CHARACTERIZATION OF SAPPHIRE (alpha-Al203) AND SILICON NITRIDE (Si3N4) USING CRYOGENIC CYCLING

10.1615/tfec2019.ref.027456 ◽

2019 ◽

Author(s):

Kirsten A. Lovelace ◽

Sonya T. Smith

Keyword(s):

Silicon Nitride ◽

Material Properties ◽

Quantitative Characterization

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ChemInform Abstract: Characterization of Silicon Nitride and Silicon Carbonitride Layers from 1,1,3,3,5,5-Hexamethylcyclotrisilazane (I) Plasmas.

ChemInform ◽

10.1002/chin.198913323 ◽

1989 ◽

Vol 20 (13) ◽

Author(s):

T. A. BROOKS ◽

D. W. HESS

Keyword(s):

Silicon Nitride ◽

Silicon Carbonitride ◽

Abstract Characterization

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Characterization of hydrogen–plasma interactions with photoresist, silicon, and silicon nitride surfaces

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4705512 ◽

2012 ◽

Vol 30 (3) ◽

pp. 031303 ◽

Cited By ~ 5

Author(s):

Bayu A. Thedjoisworo ◽

David Cheung ◽

Davoud Zamani

Keyword(s):

Silicon Nitride ◽

Hydrogen Plasma ◽

Plasma Interactions

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Fabrication and surface characterization of pulsed reactive closed-field unbalanced magnetron sputtered amorphous silicon nitride films

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2004.12.007 ◽

2006 ◽

Vol 200 (12-13) ◽

pp. 4144-4151 ◽

Cited By ~ 15

Author(s):

Zh.Q. Yao ◽

P. Yang ◽

N. Huang ◽

H. Sun ◽

G.J. Wan ◽

...

Keyword(s):

Silicon Nitride ◽

Amorphous Silicon ◽

Surface Characterization ◽

Closed Field ◽

Amorphous Silicon Nitride ◽

Silicon Nitride Films ◽

Unbalanced Magnetron

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Fabrication and characterization of silicon nitride nanopore

2013 6th International Conference on Biomedical Engineering and Informatics ◽

10.1109/bmei.2013.6746964 ◽

2013 ◽

Author(s):

Lingzhi Wu ◽

Hang Liu ◽

Yuqi Liu ◽

Hao Chen ◽

Quanjun Liu ◽

...

Keyword(s):

Silicon Nitride ◽

Fabrication And Characterization

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Characterization of the Mechanochemically Processed Silicon Nitride-Based Powders

Archives of Metallurgy and Materials ◽

10.2478/v10172-011-0136-3 ◽

2011 ◽

Vol 56 (4) ◽

Cited By ~ 3

Author(s):

T. Pawlik ◽

M. Sopicka-Lizer ◽

D. Michalik ◽

T. Włodek

Keyword(s):

Silicon Nitride

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Characterization of Silicon Nitride Thin Films on Si and Overlayer Growth of Si and Ge

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.4292 ◽

2001 ◽

Vol 40 (Part 1, No. 6B) ◽

pp. 4292-4298 ◽

Cited By ~ 5

Author(s):

Xue-Sen Wang ◽

Zongquan Li ◽

Lei Wang ◽

Yanfang Hu ◽

Guangjie Zhai ◽

...

Keyword(s):

Thin Films ◽

Silicon Nitride

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Beitrag zur Charakterisierung von reaktionsgesintertem Siliziumnitrid / Contribution to the Characterization of Reaction Sintered Silicon Nitride

Practical Metallography ◽

10.1515/pm-1981-180204 ◽

1981 ◽

Vol 18 (2) ◽

pp. 66-74

Author(s):

Franz Porz ◽

Eva Martin

Keyword(s):

Silicon Nitride ◽

Sintered Silicon

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Characterization of Chemical Vapor-Deposited (CVD) Mullite+CVD Alumina+Plasma-Sprayed Tantalum Oxide Coatings on Silicon Nitride Vanes After an Industrial Gas Turbine Engine Field Test

Journal of the American Ceramic Society ◽

10.1111/j.1551-2916.2006.01256.x ◽

2006 ◽

Vol 89 (11) ◽

pp. 3560-3563 ◽

Cited By ~ 1

Author(s):

J. A. Haynes ◽

S. M. Zemskova ◽

H. T. Lin ◽

M. K. Ferber ◽

W. Westphal

Keyword(s):

Silicon Nitride ◽

Field Test ◽

Tantalum Oxide ◽

Chemical Vapor ◽

Oxide Coatings ◽

Turbine Engine ◽

Chemical Vapor Deposited ◽

Plasma Sprayed ◽

Industrial Gas Turbine

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Fabrication and characterization of sample-supporting film made of silicon nitride for large-area observation in transmission electron microscopy

Microscopy ◽

10.1093/jmicro/dfy039 ◽

2018 ◽

Author(s):

Yuji Konyuba ◽

Tomohiro Haruta ◽

Yuta Ikeda ◽

Tomohisa Fukuda

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Silicon Nitride ◽

Large Area ◽

Transmission Electron ◽

Fabrication And Characterization

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