Characterization of hydrogen–plasma interactions with photoresist, silicon, and silicon nitride surfaces

2012 ◽  
Vol 30 (3) ◽  
pp. 031303 ◽  
Author(s):  
Bayu A. Thedjoisworo ◽  
David Cheung ◽  
Davoud Zamani
Keyword(s):  
Silicon Nitride ◽  
Hydrogen Plasma ◽  
Plasma Interactions

Characterization of the Mechanochemically Processed Silicon Nitride-Based Powders

2011 ◽  
Vol 56 (4) ◽  
Author(s):  
T. Pawlik ◽  
M. Sopicka-Lizer ◽  
D. Michalik ◽  
T. Włodek
Keyword(s):  
Silicon Nitride

Characterization of Silicon Nitride Thin Films on Si and Overlayer Growth of Si and Ge

2001 ◽  
Vol 40 (Part 1, No. 6B) ◽  
pp. 4292-4298 ◽  
Author(s):  
Xue-Sen Wang ◽  
Zongquan Li ◽  
Lei Wang ◽  
Yanfang Hu ◽  
Guangjie Zhai ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride

Characterization of Reactively Sputtered Silicon Nitride

1992 ◽  
Vol 139 (11) ◽  
pp. 3259-3263 ◽  
Author(s):  
K. Matsuzaki ◽  
A. Hirabayashi ◽  
M. Saga
Keyword(s):  
Silicon Nitride
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