Thin‐Oxide Dielectric Strength Improvement by Adding a Phosphonic Acid Chelating Agent into NH 4 OH ‐ H 2 O 2 Solution
1994 ◽
Vol 141
(10)
◽
pp. L139-L142
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Keyword(s):
2017 ◽
Vol 7
(2)
◽
pp. 650
◽
1993 ◽
Vol 140
(11)
◽
pp. 3210-3215
◽
Keyword(s):
Keyword(s):
1996 ◽
Vol 24
(4)
◽
pp. 777-781
◽