Wafer Temperature Dependence of the Vapor‐Phase HF Oxide Etch
1993 ◽
Vol 140
(1)
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pp. 205-208
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2010 ◽
Vol 59
(9)
◽
pp. 671-674
2010 ◽
Vol 7
(7-8)
◽
pp. 2022-2024
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Keyword(s):
1995 ◽
Vol 34
(Part 1, No. 8A)
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pp. 4143-4147
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1982 ◽
Vol 86
(21)
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pp. 4120-4130
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2005 ◽
Vol 274
(3-4)
◽
pp. 530-535
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