Indium Tin Oxide Dry Etching Using HBr Gas for Thin‐Film Transistor Liquid Crystal Displays

Masaru Takabatake; Youkou Wakui; Nobutake Konishi

doi:10.1149/1.2044322

Indium Tin Oxide Dry Etching Using HBr Gas for Thin‐Film Transistor Liquid Crystal Displays

Journal of The Electrochemical Society ◽

10.1149/1.2044322 ◽

1995 ◽

Vol 142 (7) ◽

pp. 2470-2473 ◽

Cited By ~ 23

Author(s):

Masaru Takabatake ◽

Youkou Wakui ◽

Nobutake Konishi

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Transistor ◽

Liquid Crystal Displays ◽

Dry Etching

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Indium-tin oxide/Si contacts with In- and Sn-diffusion barriers in polycrystalline Si thin-film transistor liquid-crystal displays

Journal of Electronic Materials ◽

10.1007/s11664-003-0223-y ◽

2003 ◽

Vol 32 (9) ◽

pp. 919-924 ◽

Cited By ~ 14

Author(s):

Hojin Ryu ◽

Jinmo Kang ◽

Younggun Han ◽

Donghwan Kim ◽

James Jungho Pak ◽

...

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Transistor ◽

Liquid Crystal Displays ◽

Diffusion Barriers ◽

Si Thin Film

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Contact Resistivity between an Al Metal Line and an Indium Tin Oxide Line of Thin Film Transistor Liquid Crystal Displays

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.791 ◽

2002 ◽

Vol 41 (Part 1, No. 2A) ◽

pp. 791-794 ◽

Cited By ~ 6

Author(s):

Ho-Nyeon Lee ◽

Jae-Chel Park ◽

Hyun-Jin Kim ◽

Won-Geon Lee

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Transistor ◽

Liquid Crystal Displays ◽

Contact Resistivity ◽

Metal Line

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Data- and Gate-Line-Sharing Pixel Structure and Driving Method for Low-Cost Polycrystalline Silicon Thin Film Transistor Liquid Crystal Displays

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.1375 ◽

2007 ◽

Vol 46 (3B) ◽

pp. 1375-1379 ◽

Cited By ~ 2

Author(s):

Young-Ja Kim ◽

Il-Hun Jeong ◽

Han-Jun Kim ◽

Oh-Kyong Kwon

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Polycrystalline Silicon ◽

Low Cost ◽

Thin Film Transistor ◽

Liquid Crystal Displays ◽

Silicon Thin Film

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Nanostructural investigation of whiskers and hillocks of Al-based metallization in thin-film transistor liquid crystal displays

Fourth international workshop on stress induced phenomena in metallization ◽

10.1063/1.54659 ◽

1998 ◽

Author(s):

Katsuhiro Tsujimoto ◽

Satoshi Tsuji ◽

Hiroshi Takatsuji ◽

Kotaro Kuroda ◽

Hiroyasu Saka ◽

...

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Thin Film Transistor ◽

Liquid Crystal Displays

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Rigorous calculation of pixel and inter-electrode capacitances of thin-film transistor liquid crystal displays using three-dimensional simulation

Liquid Crystals ◽

10.1080/0267829021000018077 ◽

2003 ◽

Vol 30 (1) ◽

pp. 1-5 ◽

Cited By ~ 6

Author(s):

Sung-Min Jung ◽

Woo-Sang Park

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Thin Film Transistor ◽

Three Dimensional ◽

Liquid Crystal Displays ◽

Rigorous Calculation ◽

Dimensional Simulation

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Thin-Film-Transistor-Addressed Liquid Crystal Displays

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication ◽

10.1117/3.2265071.ch10 ◽

2017 ◽

Cited By ~ 1

Author(s):

Fang-Chen Luo

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Thin Film Transistor ◽

Liquid Crystal Displays

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Measurement of Surface Tension of Epoxy Resins Used in Dispensing Process for Manufacturing Thin Film Transistor-Liquid Crystal Displays

IEEE Transactions on Advanced Packaging ◽

10.1109/tadvp.2007.901767 ◽

2008 ◽

Vol 31 (1) ◽

pp. 100-106 ◽

Cited By ~ 9

Author(s):

Chin-Hsiang Cheng ◽

Hung-Hsiang Lin

Keyword(s):

Thin Film ◽

Surface Tension ◽

Liquid Crystal ◽

Epoxy Resins ◽

Thin Film Transistor ◽

Liquid Crystal Displays

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Fabrication of indium-tin-oxide thin-film transistor using anodization

2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) ◽

10.1109/am-fpd.2014.6867136 ◽

2014 ◽

Author(s):

Lei Xie ◽

Yang Shao ◽

Xiang Xiao ◽

Letao Zhang ◽

Xiaobin Bi ◽

...

Keyword(s):

Thin Film ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Transistor ◽

Oxide Thin Film

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Alignment Technique for Thin-Film-Transistor Liquid-Crystal Displays

Japanese Journal of Applied Physics ◽

10.1143/jjap.30.3308 ◽

1991 ◽

Vol 30 (Part 1, No. 11B) ◽

pp. 3308-3312 ◽

Cited By ~ 4

Author(s):

Shinji Shimada ◽

Takao Nomura ◽

Eiichi Takahashi ◽

Masahiro Adachi ◽

Kiyoshi Toda ◽

...

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Thin Film Transistor ◽

Liquid Crystal Displays ◽

Alignment Technique

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A two dimensional liquid crystal simulation for thin film transistor liquid crystal displays

Liquid Crystals ◽

10.1080/02678299308027828 ◽

1993 ◽

Vol 14 (4) ◽

pp. 1199-1208 ◽

Cited By ~ 2

Author(s):

K. Sumiyoshi ◽

K. Takatori ◽

N. Takahashi ◽

Y. Hirai

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Thin Film Transistor ◽

Liquid Crystal Displays ◽

Two Dimensional

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