Nanoscale Lithography of Silicon Dioxide Using Electron Beam Patterned Carboxylic Acids as Localized Etch Initiators

1997 ◽  
Vol 144 (2) ◽  
pp. 605-616 ◽  
Author(s):  
T. K. Whidden ◽  
S.‐J. Yang ◽  
A. Jenkins‐Gray ◽  
M. Pan ◽  
M. N. Kozicki
Keyword(s):  
Electron Beam ◽  
Silicon Dioxide ◽  
Carboxylic Acids

Selectivity variations of electron beam patterned silicon dioxide films*

1994 ◽  
Vol 12 (4) ◽  
pp. 2457-2461 ◽  
Author(s):  
John F. Kimball ◽  
Patricia E. Allen ◽  
Dieter P. Griffis ◽  
Zbigniew J. Radzimski ◽  
Phillip E. Russell
Keyword(s):  
Electron Beam ◽  
Silicon Dioxide ◽  
Silicon Dioxide Films

Effects of Film Variety on the Amounts of Carboxylic Acids from Electron Beam Irradiated Polyethylene Film

1984 ◽  
Vol 48 (8) ◽  
pp. 2003-2008
Author(s):  
Keiko Azuma ◽  
Yoshikazu Tanaka ◽  
Hirotaka Tsunoda ◽  
Takashi Hirata ◽  
Takasuke Ishitani
Keyword(s):  
Electron Beam ◽  
Carboxylic Acids ◽  
Polyethylene Film

Silicon dioxide modification by an electron beam

2004 ◽  
Vol 46 (6) ◽  
pp. 1018-1023 ◽  
Author(s):  
L. A. Bakaleinikov ◽  
M. V. Zamoryanskaya ◽  
E. V. Kolesnikova ◽  
V. I. Sokolov ◽  
E. Yu. Flegontova
Keyword(s):  
Electron Beam ◽  
Silicon Dioxide
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