In Situ Optical Analysis of the Gas Phase during the Deposition of Silicon Carbide from Methyltrichlorosilane
1996 ◽
Vol 143
(5)
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pp. 1654-1661
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2004 ◽
Vol 4
(4)
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pp. 450-462
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Keyword(s):
Keyword(s):
2011 ◽
Vol 37
(3)
◽
pp. 1063-1072
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Keyword(s):