Study of Surface Charge Effects on Oxide and Nitride Planarization Using Alumina/Ceria Mixed Abrasive Slurries
2004 ◽
Vol 7
(12)
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pp. G316
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2019 ◽
Vol 91
(9)
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pp. 5530-5536
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Keyword(s):
2005 ◽
Vol 125
(5)
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pp. 493-503
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2007 ◽
Vol 599
(2)
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pp. 249-259
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Keyword(s):
1962 ◽
Vol 58
(166)
◽
pp. 147-184
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1988 ◽
Vol 945
(1)
◽
pp. 65-72
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Keyword(s):