Proper Hot Filament CVD Conditions for Fabrication of Ti-Boron Doped Diamond Electrodes

2004 ◽  
Vol 151 (4) ◽  
pp. B214 ◽  
Author(s):  
Xueming Chen ◽  
Guohua Chen
1996 ◽  
Vol 45 (10) ◽  
pp. 1771
Author(s):  
LIAO KE-JUN ◽  
WANG WAN-LU ◽  
ZHANG ZHEN-GANG ◽  
WU BIN

2014 ◽  
Vol 911 ◽  
pp. 276-280 ◽  
Author(s):  
Somsak Cheirsirikul ◽  
Tosnus Mongkolkiartichai

This report Studied and development of diamond microelectrodes for Amperometric oxygen sensor. Boron-doped diamond film was Synthesized on a Si substrate by Hot-Filament CVD with the optimization Condition for film thickness 5 μm. This diamond film has the active area of electrode Control dimensions by technique uses SiO2be a mask Protecting diamond film formation. Four-point probe in additional and Hall Effect technique were used to measure the resistivity, and to measure carriers concentrations of the respectively. Study electrochemistry characteristics of diamond electrodes using Cyclic Voltammetry method. These B/C 10,000 PPM Boron doped diamond electrodes are used as working electrodes of Amperometric oxygen sensor for various of this gas levels detection. These electrodes are packaged with 0.1M KCl solution. The experiment show that current density of the diamond microelectrodes with 100 μm spacing was greater than the current density of the diamond microelectrodes with 40 μm spacing and the planar diamond electrode.


2006 ◽  
Vol 53 (4) ◽  
pp. 839-844 ◽  
Author(s):  
Chia-Chin Changa ◽  
Li-Chia Chena ◽  
Shyh-Jiun Liu ◽  
Hsien-Ju Tien ◽  
Hsien-Chang Chang

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