Stability of Carbon-Doped Silicon Oxide Low-k Thin Films

2004 ◽  
Vol 151 (4) ◽  
pp. F73 ◽  
Author(s):  
Y. H. Wang ◽  
R. Kumar
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Carbon Doped ◽  
Doped Silicon ◽  
Low K

Study of SiH4-based PECVD Low-k Carbon-doped Silicon Oxide

2000 ◽  
Vol 612 ◽  
Author(s):  
Hongning Yang ◽  
Douglas J. Tweet ◽  
Lisa H. Stecker ◽  
Wei Pan ◽  
David R. Evans ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Oxide ◽  
Additional Cost ◽  
Electrical Performance ◽  
Electrical Characteristics ◽  
Carbon Doped ◽  
Doped Silicon ◽  
Low K

AbstractIn previous studies, low-k carbon-doped silicon oxide (SiOC) films were deposited using organosilicon precursor: (CH3)xSiH4−x. In this paper, we present the properties of PECVD low-k SiOC films produced by using conventional SiH4 based gas precursors. The SiH4 based SiOC films have similar gross physical and electrical characteristics to those of (CH3)xSiH4−x based SiOC. Since the precursors are inexpensive, commercially available and convenient to operate for existing tools, the process should not require additional cost as compared with that of PECVD silicon dioxide. We demonstrate the feasibility of integrating Cu with SiOC on damascene interconnection. The evaluation on electrical performance of the Cu/SiOC based damascene structure will be discussed.

Facile Fabrication Procedure for C60-Doped Silicon Oxide Thin Films

1997 ◽  
Vol 26 (10) ◽  
pp. 995-996 ◽  
Author(s):  
Isao Hasegawa ◽  
Koji Shibusa ◽  
Satoshi Kobayashi ◽  
Shuichi Nonomura ◽  
Shoji Nitta
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films ◽  
Doped Silicon ◽  
Fabrication Procedure ◽  
Facile Fabrication

Luminescence of Er-doped silicon oxide–zirconia thin films

2009 ◽  
Vol 129 (7) ◽  
pp. 696-703 ◽  
Author(s):  
Carlos Rozo ◽  
Luis F. Fonseca ◽  
Daniel Jaque ◽  
José García Solé
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Doped Silicon ◽  
Er Doped

Atomic layer deposition of carbon doped silicon oxide by precursor design and process tuning

2018 ◽  
Vol 36 (2) ◽  
pp. 021509 ◽  
Author(s):  
Meiliang Wang ◽  
Haripin Chandra ◽  
Xinjian Lei ◽  
Anupama Mallikarjunan ◽  
Kirk Cuthill ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Oxide ◽  
Atomic Layer ◽  
Carbon Doped ◽  
Layer Deposition ◽  
Doped Silicon

Intense blue–white luminescence from carbon-doped silicon-rich silicon oxide

2004 ◽  
Vol 84 (5) ◽  
pp. 717-719 ◽  
Author(s):  
Se-Young Seo ◽  
Kwan-Sik Cho ◽  
Jung H. Shin
Keyword(s):  
Silicon Oxide ◽  
Carbon Doped ◽  
Doped Silicon ◽  
White Luminescence
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