Ba(Ti[sub 0.8]Sn[sub 0.2])O[sub 3] Thin Films Prepared by Radio-Frequency Magnetron Sputtering for Dynamic Random Access Memory Applications

1999 ◽  
Vol 2 (5) ◽  
pp. 236 ◽  
Author(s):  
Yu-Fu Kuo
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Random Access ◽  
Random Access Memory ◽  
Radio Frequency Magnetron ◽  
Dynamic Random Access Memory ◽  
Radio Frequency Magnetron Sputtering ◽  
Access Memory ◽  
Memory Applications

(Ba,Sr)TiO3 thin films with conducting perovskite electrodes for dynamic random access memory applications

1999 ◽  
Vol 74 (21) ◽  
pp. 3194-3196 ◽  
Author(s):  
B. Nagaraj ◽  
T. Sawhney ◽  
S. Perusse ◽  
S. Aggarwal ◽  
R. Ramesh ◽  
...  
Keyword(s):  
Thin Films ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Memory Applications
Sign in / Sign up

Export Citation Format

Share Document