Effects of Wet Ambient on Dry Oxidation Processes at 4H-SiC/SiO2 Interface: An Ab Initio Study
1998 ◽
Vol 184-185
(1-2)
◽
pp. 80-84
◽
Keyword(s):
1987 ◽
Vol 52
(1)
◽
pp. 6-13
◽