In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation

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Vol 86 (16) ◽  
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Clément Bessouet ◽  
Philippe Coste ◽  
Helene Lecoq ◽  
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Low Temperature ◽  
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FT-IR, SIMS and electrical characterization of Si3N4 thin films obtained from CVD, assisted by in situ electrical discharge

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J.C. Bureau ◽  
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Vol 143 (1-3) ◽  
pp. 31-37 ◽  
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S.A. Travain ◽  
G.F. Leal Ferreira ◽  
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scholarly journals In situ electrical characterization of YxTiy getter thin films during thermal activation

2019 ◽  
Vol 1319 ◽  
pp. 012012
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C Bessouet ◽  
S Lemettre ◽  
A Bosseboeuf ◽  
P Coste ◽  
Ch Renard ◽  
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Keyword(s):  
Thin Films ◽  
Thermal Activation ◽  
Electrical Characterization
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