Measurement of Low Concentration Nitrogen in Czochralski Silicon by Infrared Absorption Spectroscopy

2018 ◽  
Vol 86 (10) ◽  
pp. 87-94
Author(s):  
Naohisa Inoue ◽  
Shuichi Okuda ◽  
Shuichi Kawamata
1999 ◽  
Author(s):  
Simon Tam ◽  
Michelle E. DeRose ◽  
Mario E. Fajardo ◽  
Norihito Sogoshi ◽  
Yoshiyasu Kato

2021 ◽  
Author(s):  
Adam J. Fleisher ◽  
Hongming Yi ◽  
Abneesh Srivastava ◽  
Oleg L. Polyansky ◽  
Nikolai F. Zobov ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document