Measurement of Low Concentration Nitrogen in Czochralski Silicon by Infrared Absorption Spectroscopy
1993 ◽
Vol 32
(Part 2, No. 12A)
◽
pp. L1715-L1717
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1984 ◽
Vol 80
(6)
◽
pp. 2314-2318
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2009 ◽
Vol 113
(6)
◽
pp. 2256-2262
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