(Invited) Low-Temperature Processed and Self-Aligned InGaZnO Thin-Film Transistor with an Organic Gate Insulator for Flexible Device Applications

M. Furuta; T. Toda; G. Tatsuoka; Y. Magari

doi:10.1149/07510.0117ecst

(Invited) Low-Temperature Processed and Self-Aligned InGaZnO Thin-Film Transistor with an Organic Gate Insulator for Flexible Device Applications

ECS Transactions ◽

10.1149/07510.0117ecst ◽

2016 ◽

Vol 75 (10) ◽

pp. 117-122

Author(s):

M. Furuta ◽

T. Toda ◽

G. Tatsuoka ◽

Y. Magari

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistor ◽

Gate Insulator ◽

Flexible Device ◽

Device Applications

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(Invited) Low-Temperature Processed and Self-Aligned InGaZnO Thin-Film Transistor with an Organic Gate Insulator for Flexible Device Applications

ECS Meeting Abstracts ◽

10.1149/ma2016-02/33/2131 ◽

2016 ◽

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistor ◽

Gate Insulator ◽

Flexible Device ◽

Device Applications

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High performance low temperature polysilicon thin film transistor using ECR plasma thermal oxide as gate insulator

IEEE Electron Device Letters ◽

10.1109/55.296223 ◽

1994 ◽

Vol 15 (8) ◽

pp. 301-303 ◽

Cited By ~ 17

Author(s):

Jung-Yeal Lee ◽

Chul-Hi Han ◽

Choong-Ki Kim

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

Gate Insulator ◽

Ecr Plasma ◽

Thermal Oxide

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Stacked gate insulator of photooxide and PECVD film from SiH4 and N2O for low-temperature poly-Si thin-film transistor

Electronics and Communications in Japan (Part II Electronics) ◽

10.1002/ecjb.10100 ◽

2003 ◽

Vol 86 (11) ◽

pp. 21-28

Author(s):

Yukihiko Nakata ◽

Tetsuya Okamoto ◽

Takashi Itoga ◽

Toshimasa Hamada ◽

Yutaka Ishii

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistor ◽

Gate Insulator ◽

Si Thin Film

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Photocurable Polyimide Gate Insulator for Pentacene Thin-Film Transistor With Excellent Chemical Resistance by Low Temperature Processing

Molecular Crystals and Liquid Crystals ◽

10.1080/15421401003594537 ◽

2010 ◽

Vol 519 (1) ◽

pp. 192-198 ◽

Cited By ~ 4

Author(s):

Jin Hee Lee ◽

Ji Young Kim ◽

Mi Hye Yi ◽

Jae Won Ka ◽

Taek Sung Hwang ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Chemical Resistance ◽

Thin Film Transistor ◽

Gate Insulator ◽

Low Temperature Processing ◽

Excellent Chemical

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A Low Temperature, Solution-Processed Poly(4-vinylphenol), YOx Nanoparticle Composite/Polysilazane Bi-Layer Gate Insulator for ZnO Thin Film Transistor

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2016.11080 ◽

2016 ◽

Vol 16 (3) ◽

pp. 2632-2636 ◽

Cited By ~ 3

Author(s):

Hyeonwoo Shin ◽

Chan-Mo Kang ◽

Hyunsik Chae ◽

Hyun-Gwan Kim ◽

Kyu-Ha Baek ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistor ◽

Gate Insulator ◽

Zno Thin Film ◽

Solution Processed ◽

Temperature Solution

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Low-temperature-processed (<100 °C) organic thin-film transistor using hollow-cathode CVD SiO2as the gate insulator

Semiconductor Science and Technology ◽

10.1088/0268-1242/25/7/075006 ◽

2010 ◽

Vol 25 (7) ◽

pp. 075006 ◽

Cited By ~ 7

Author(s):

Ching-Lin Fan ◽

Ping-Cheng Chiu ◽

Yan-Hang Yang ◽

Chang-Chih Lin

Keyword(s):

Thin Film ◽

Low Temperature ◽

Hollow Cathode ◽

Thin Film Transistor ◽

Gate Insulator ◽

Organic Thin Film ◽

Organic Thin Film Transistor

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Excellent heat resistance polymeric gate insulator for thin-film transistor by low temperature and solution processing

Thin Solid Films ◽

10.1016/j.tsf.2010.02.047 ◽

2010 ◽

Vol 518 (22) ◽

pp. 6280-6284 ◽

Cited By ~ 9

Author(s):

Ji Young Kim ◽

Mi Hye Yi ◽

Taek Ahn

Keyword(s):

Thin Film ◽

Low Temperature ◽

Heat Resistance ◽

Thin Film Transistor ◽

Gate Insulator ◽

Solution Processing

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A high-performance polycrystalline silicon thin film transistor with a silicon nitride gate insulator

IEEE Transactions on Electron Devices ◽

10.1109/16.735734 ◽

1998 ◽

Vol 45 (12) ◽

pp. 2548-2551 ◽

Cited By ~ 27

Author(s):

K.H. Lee ◽

J.K. Park ◽

Jin Jang

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Polycrystalline Silicon ◽

High Performance ◽

Thin Film Transistor ◽

Gate Insulator ◽

Silicon Thin Film

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Amorphous-silicon thin-film transistor with liquid phase deposition of silicon dioxide gate insulator

IEEE Electron Device Letters ◽

10.1109/55.748913 ◽

1999 ◽

Vol 20 (3) ◽

pp. 138-139 ◽

Cited By ~ 6

Author(s):

Jiun-Lin Yeh ◽

Si-Chen Lee

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Silicon Dioxide ◽

Amorphous Silicon ◽

Thin Film Transistor ◽

Gate Insulator ◽

Liquid Phase Deposition ◽

Silicon Thin Film

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Optimization of excimer laser annealing on low temperature polysilicon for thin film transistor applications

2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings ◽

10.1109/icsict.2006.306181 ◽

2006 ◽

Cited By ~ 1

Author(s):

T.C. Cheng ◽

W.C. Chang ◽

K.F. Yarn ◽

C.F. Lo ◽

J.K. Kuo

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Laser Annealing ◽

Thin Film Transistor ◽

Excimer Laser Annealing

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