Fluorescence Correlation Spectroscopic Studies of Particle Properties for Colloidal Ceria Abrasives Used in Chemical-Mechanical Planarization

2016 ◽  
Vol 72 (18) ◽  
pp. 43-51
Author(s):  
D. K. Schorr ◽  
M. A. Smith ◽  
A. K. Rawat ◽  
C. T. Carver ◽  
M. Mansour ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Spectroscopic Studies ◽  
Fluorescence Correlation ◽  
Particle Properties

Fluorescence Correlation Spectroscopic Studies of a Single Lipopolyamine–DNA Nanoparticle

2007 ◽  
pp. 381-413 ◽  
Author(s):  
Noppadon Adjimatera ◽  
Aleš Benda ◽  
Ian S. Blagbrough ◽  
Marek Langner ◽  
Martin Hof ◽  
...  
Keyword(s):  
Spectroscopic Studies ◽  
Fluorescence Correlation

Fluorescence Correlation Spectroscopic Investigation of Surface Adsorption of CMP Slurry Additives on Abrasive Particles

2013 ◽  
Vol 1560 ◽  
Author(s):  
Ashley E. Wayman ◽  
Daniel K. Turner ◽  
Ashwani Rawat ◽  
Colin T. Carver ◽  
Mansour Moinpour ◽  
...  
Keyword(s):  
Fluorescent Probe ◽  
Competitive Adsorption ◽  
Chemical Mechanical Planarization ◽  
Sol Gel ◽  
Abrasive Particle ◽  
Correlation Spectroscopy ◽  
Abrasive Particles ◽  
Fluorescence Correlation ◽  
Particle Adsorption

ABSTRACTAdditive-abrasive interactions in chemical-mechanical planarization (CMP) slurries are investigated using fluorescence correlation spectroscopy (FCS). The FCS technique provides quantitative determinations of the interaction between additives and abrasive particles by characterizing the competitive adsorption of the additive and a fluorescent probe molecule by an abrasive particle. Adsorption of the CMP additives glycine and benzotriazole (BTA) on precipitated and sol-gel colloidal silica abrasives are characterized. Significant differences in the fluorescent probe’s adsorption to the different silica abrasives in the presence of the additives suggest surface chemistry differences between the different types of silica. Extensions of the analysis of FCS data are proposed for improving the quantitative determination of the competitive adsorption of fluorescent probe dyes and CMP additives on abrasive particles.

Spectroscopic studies of Pd (II) complexes with cysteine and its di- and tripeptides

1987 ◽  
Vol 84 ◽  
pp. 443-448 ◽  
Author(s):  
Teresa Kowalik ◽  
Brigitte Decock-Le Reverend ◽  
Claude Loucheux ◽  
Damien Ficheux ◽  
Henryk Kozlowski
Keyword(s):  
Spectroscopic Studies
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