Application of Fluorescence Correlation Spectroscopy in the Characterization of Particle Size Distributions of Colloidal Silica Abrasives Used in Chemical-Mechanical Planarization

2014 ◽  
Vol 61 (17) ◽  
pp. 55-63 ◽  
Author(s):  
L. M. Jacobson ◽  
D. K. Turner ◽  
A. K. Rawat ◽  
C. T. Carver ◽  
A. Tripahi ◽  
...  
Keyword(s):  
Particle Size ◽  
Fluorescence Correlation Spectroscopy ◽  
Colloidal Silica ◽  
Chemical Mechanical Planarization ◽  
Correlation Spectroscopy ◽  
Size Distributions ◽  
Particle Size Distributions ◽  
Fluorescence Correlation

Advances in the Characterization of Particle Size Distributions of Abrasive Particles used in CMP

2007 ◽  
Vol 991 ◽  
Author(s):  
Mungai Kamiti ◽  
Stacey Popadowski ◽  
Edward E. Remsen
Keyword(s):  
Particle Size ◽  
Colloidal Silica ◽  
Particle Diameter ◽  
Water Soluble ◽  
Size Distributions ◽  
Organic Additives ◽  
Particle Size Distributions ◽  
Abrasive Particles ◽  
Theoretical Simulations

ABSTRACTThe use of density gradient stabilized centrifugal sedimentation (disc centrifugation) for the characterization of abrasive particles in CMP slurries is reported. For slurries prepared with ceria and colloidal silica abrasives, the technique is demonstrated as capable of providing highly repeatable analyses of the abrasive's apparent particle size distribution (PSD). The addition of water soluble organic additives to the slurries is shown to produce large shifts in the apparent PSD relative to the PSD of the pure abrasive particles. Particle-additive interactions driving the shift in apparent PSD could not be interpreted with confidence due to the lack of accurate densities for particle-abrasive complexes formed in the slurry. To address this problem, sucrose density gradients prepared using H2O and D2O were tested as spin fluids of different densities to analyze a colloidal silica standard with a narrow PSD. Preliminary results comparing experimental disc centrifuge data with theoretical simulations of the disc sedimentation pattern suggest that this technique can potentially characterize both the particle diameter and density of abrasive particles in a CMP slurry.

scholarly journals Multifractal characterization of saprolite particle-size distributions after topsoil removal

Geoderma ◽  
2006 ◽  
Vol 134 (3-4) ◽  
pp. 373-385 ◽  
Author(s):  
J.G.V. Miranda ◽  
E. Montero ◽  
M.C. Alves ◽  
A. Paz González ◽  
E. Vidal Vázquez
Keyword(s):  
Particle Size ◽  
Size Distributions ◽  
Particle Size Distributions ◽  
Topsoil Removal

Characterization of Pteridines: a New Approach by Fluorescence Correlation Spectroscopy and Analysis of Assay Sensitivity

Pteridines ◽  
2001 ◽  
Vol 12 (4) ◽  
pp. 147-153 ◽  
Author(s):  
U. Demel ◽  
Z. Foldes-Papp ◽  
D. Fuchs ◽  
G. P. Tilz
Keyword(s):  
Single Molecule ◽  
Fluorescence Correlation Spectroscopy ◽  
Correlation Spectroscopy ◽  
Cell Mediated Immunity ◽  
Distribution Analysis ◽  
Assay Sensitivity ◽  
New Approach ◽  
Single Molecule Level ◽  
Fluorescence Correlation

Abstract In the present investigation, fluorescence con-elation spectroscopy (FCS) was used to measure the molecular motion of the pteridine derivative neopterin. However, technical limitations in the present optical setup precluded the identification of ,single neopterin molecules. FCS measurements with a fluorophore were also can-ied out for comparison. Exemplified by rhodamine green, we have introduced a concept that allows the detection, identification and analysis of assays in solution at the single-molecule level in tenns of bulk concentration. This concept is based on FCS and Poisson distribution analysis of assay sensitivity. The molecules had not to be quantified in a more concentrated fonn, or in flow and trapping experiments. The study demonstrated an ultrasensitive, reliable, rapid and direct tool for analytics and diagnostics in solution. We discuss a possible application of our new concept in activation control of cell-mediated immunity via neopterin determination.

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