Spectroscopic Ellipsometry Characterization of Pd Thin Film Grown by Atomic Layer Deposition

2015 ◽  
Vol 69 (7) ◽  
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Author(s):  
Y. Zhang ◽  
X. Zhou ◽  
K. Cao ◽  
X. Chen ◽  
S. Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
Layer Deposition

Characterization of Ru thin-film conductivity upon atomic layer deposition on H-passivated Si(111)

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Vol 112 (11) ◽  
pp. 113517 ◽  
Author(s):  
K. Roodenko ◽  
S. K. Park ◽  
J. Kwon ◽  
L. Wielunski ◽  
Y. J. Chabal
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Thin Film ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Film Conductivity

Characterization of HfO N thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas

2015 ◽  
Vol 349 ◽  
pp. 757-762 ◽  
Author(s):  
Young Bok Lee ◽  
Il-Kwon Oh ◽  
Edward Namkyu Cho ◽  
Pyung Moon ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Formation ◽  
Atomic Layer ◽  
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Thin Film Formation

Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition

2014 ◽  
Vol 556 ◽  
pp. 186-194 ◽  
Author(s):  
Marja N. Mullings ◽  
Carl Hägglund ◽  
Jukka T. Tanskanen ◽  
Yesheng Yee ◽  
Scott Geyer ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Characterization ◽  
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scholarly journals Magneto-optical characterization of ZnO / Ni nano-laminate obtained via Atomic Layer Deposition

2021 ◽  
Vol 1762 (1) ◽  
pp. 012041
Author(s):  
K Buchkov ◽  
A Galluzzi ◽  
B Blagoev ◽  
A Paskaleva ◽  
P Terziyska ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Optical Characterization ◽  
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