Development of Cu CMP Slurry with High Throughput and Low Dishing

2013 ◽  
Vol 52 (1) ◽  
pp. 569-574 ◽  
Author(s):  
J. Jing ◽  
Y. Wang ◽  
J. Zhang ◽  
X. Cai ◽  
X. Wang ◽  
...  
Keyword(s):  
Author(s):  
T. Kanki ◽  
T. Shirasu ◽  
S. Takesako ◽  
M. Sakamoto ◽  
Akbar Ade Asneil ◽  
...  
Keyword(s):  

2007 ◽  
Vol 177 (4S) ◽  
pp. 52-53
Author(s):  
Stefano Ongarello ◽  
Eberhard Steiner ◽  
Regina Achleitner ◽  
Isabel Feuerstein ◽  
Birgit Stenzel ◽  
...  

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