Hot-electron effects and oxide degradation in MOS structures studied with ballistic electron emission microscopy

R. Ludeke

doi:10.1147/rd.444.0517

Hot-electron effects and oxide degradation in MOS structures studied with ballistic electron emission microscopy

IBM Journal of Research and Development ◽

10.1147/rd.444.0517 ◽

2000 ◽

Vol 44 (4) ◽

pp. 517-534 ◽

Cited By ~ 16

Author(s):

R. Ludeke

Keyword(s):

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Oxide Degradation ◽

Emission Microscopy ◽

Mos Structures ◽

Electron Effects

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Hot-electron scattering at Schottky interfaces measured by temperature dependent ballistic electron emission microscopy

Applied Surface Science ◽

10.1016/s0169-4332(96)00215-2 ◽

1996 ◽

Vol 104-105 ◽

pp. 274-281 ◽

Cited By ~ 9

Author(s):

C.A. Ventrice ◽

V.P. LaBella ◽

G. Ramaswamy ◽

H.-P. Yu ◽

L.J. Schowalter

Keyword(s):

Electron Scattering ◽

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Temperature Dependent ◽

Ballistic Electron ◽

Emission Microscopy

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Conduction band energies and hot-electron transport characteristics of epitaxial Sc2O3∕Si (111) studied by ballistic electron emission microscopy and internal photoemission

Applied Physics Letters ◽

10.1063/1.2757150 ◽

2007 ◽

Vol 91 (4) ◽

pp. 042901 ◽

Cited By ~ 8

Author(s):

W. Cai ◽

S. E. Stone ◽

J. P. Pelz ◽

L. F. Edge ◽

D. G. Schlom

Keyword(s):

Electron Transport ◽

Conduction Band ◽

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Internal Photoemission ◽

Ballistic Electron ◽

Emission Microscopy ◽

Hot Electron Transport

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Measuring spin dependent hot electron transport through a metal-semiconductor interface using spin-polarized ballistic electron emission microscopy

Physical Review B ◽

10.1103/physrevb.76.195311 ◽

2007 ◽

Vol 76 (19) ◽

Cited By ~ 3

Author(s):

A. J. Stollenwerk ◽

M. R. Krause ◽

J. J. Garramone ◽

E. J. Spadafora ◽

V. P. LaBella

Keyword(s):

Electron Transport ◽

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Semiconductor Interface ◽

Ballistic Electron ◽

Spin Polarized ◽

Emission Microscopy ◽

Hot Electron Transport

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Avalanche ballistic electron emission microscopy with single hot-electron sensitivity

Applied Physics Letters ◽

10.1063/1.1613996 ◽

2003 ◽

Vol 83 (14) ◽

pp. 2841-2843 ◽

Cited By ~ 1

Author(s):

E. R. Heller ◽

C. Tivarus ◽

J. P. Pelz

Keyword(s):

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Hot electron transport studies of the Cu/Si(001) interface using ballistic electron emission microscopy

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3136761 ◽

2009 ◽

Vol 27 (4) ◽

pp. 2044 ◽

Cited By ~ 10

Author(s):

J. J. Garramone ◽

J. R. Abel ◽

I. L. Sitnitsky ◽

R. L. Moore ◽

V. P. LaBella

Keyword(s):

Electron Transport ◽

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Transport Studies ◽

Emission Microscopy ◽

Hot Electron Transport

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Investigation of HfO2/SiO2/n-Si(001)-based MOS structures via ballistic electron emission microscopy

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques ◽

10.1134/s1027451010030109 ◽

2010 ◽

Vol 4 (3) ◽

pp. 411-422 ◽

Cited By ~ 8

Author(s):

M. A. Lapshina ◽

M. A. Isakov ◽

D. O. Filatov ◽

S. V. Tikhonov ◽

Yu. A. Matveev ◽

...

Keyword(s):

Electron Emission ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy ◽

Mos Structures

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Measurement of hot-electron scattering processes at Au/Si(100) Schottky interfaces by temperature-dependent ballistic-electron-emission microscopy

Physical Review B ◽

10.1103/physrevb.53.3952 ◽

1996 ◽

Vol 53 (7) ◽

pp. 3952-3959 ◽

Cited By ~ 38

Author(s):

C. A. Ventrice ◽

V. P. LaBella ◽

G. Ramaswamy ◽

H. -P. Yu ◽

L. J. Schowalter

Keyword(s):

Electron Scattering ◽

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Temperature Dependent ◽

Ballistic Electron ◽

Emission Microscopy

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Erratum: “Microscopic characterization of hot-electron spreading and trapping in SiO2 films using ballistic electron emission microscopy” [Appl. Phys. Lett. 73, 1871 (1998)]

Applied Physics Letters ◽

10.1063/1.123041 ◽

1999 ◽

Vol 74 (3) ◽

pp. 478-478

Author(s):

B. Kaczer ◽

H.-J. Im ◽

J. P. Pelz ◽

R. M. Wallace

Keyword(s):

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Sio2 Films ◽

Ballistic Electron ◽

Emission Microscopy

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Hot-electron transport processes in ballistic-electron emission microscopy at Au–Si interfaces

Journal of Electron Spectroscopy and Related Phenomena ◽

10.1016/s0368-2048(00)00118-3 ◽

2000 ◽

Vol 109 (1-2) ◽

pp. 211-222 ◽

Cited By ~ 14

Author(s):

M. Dähne-Prietsch ◽

T. Kalka

Keyword(s):

Electron Transport ◽

Electron Emission ◽

Transport Processes ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy ◽

Hot Electron Transport

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Hot-electron transport through Au/GaAs and Au/GaAs/AlAs heterojunction interfaces: Ballistic-electron-emission-microscopy measurement and Monte Carlo simulation

Physical Review B ◽

10.1103/physrevb.53.4845 ◽

1996 ◽

Vol 53 (8) ◽

pp. 4845-4849 ◽

Cited By ~ 22

Author(s):

Mao-long Ke ◽

D. I. Westwood ◽

C. C. Matthai ◽

B. E. Richardson ◽

R. H. Williams

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Transport ◽

Electron Emission ◽

Hot Electron ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Microscopy Measurement ◽

Emission Microscopy ◽

Hot Electron Transport

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