Gas-Assisted Focused Ion Beam Etching of Indium–Tin Oxide Film
2008 ◽
Vol 47
(1)
◽
pp. 347-350
◽
Keyword(s):
Ion Beam
◽
2012 ◽
Vol 564
(1)
◽
pp. 185-190
◽
Keyword(s):
2008 ◽
Vol 47
(1)
◽
pp. 197-201
◽
2006 ◽
Vol 5
(1)
◽
pp. 011006
◽
1998 ◽
Vol 313-314
◽
pp. 394-397
◽
Keyword(s):