Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface

2005 ◽  
Vol 44 (4B) ◽  
pp. 2245-2251
Author(s):  
Atsushi Hidaka ◽  
Satoru Yamashita ◽  
Hidekazu Ishii ◽  
Takeyoshi Kato ◽  
Naoki Tanahashi ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Adsorption Behavior ◽  
Wafer Surface ◽  
Silicon Wafer Surface

Adsorption Behavior of Various Fluorocarbon Gases on the Silicon Wafer Surface

2004 ◽  
Author(s):  
Atsushi Hidaka ◽  
Satoru Yamashita ◽  
Takeyoshi Kato ◽  
Yasuyuki Shirai ◽  
Tadahiro Ohmi
Keyword(s):  
Silicon Wafer ◽  
Adsorption Behavior ◽  
Wafer Surface ◽  
Silicon Wafer Surface

Characterization of Crystal Quality by Crystal Originated Particle Delineation and the Impact on the Silicon Wafer Surface

1998 ◽  
Vol 145 (1) ◽  
pp. 275-284 ◽  
Author(s):  
D. Gräf ◽  
M. Suhren ◽  
U. Lambert ◽  
R. Schmolke ◽  
A. Ehlert ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Crystal Quality ◽  
Wafer Surface ◽  
Silicon Wafer Surface ◽  
The Impact

Clean Silicon Wafer Surface by a Slight Etch Method

1988 ◽  
Author(s):  
Ritsuo Takizawa ◽  
Toshiro Nakanishi ◽  
Kouichirou Honda ◽  
Akira Ohsawa
Keyword(s):  
Silicon Wafer ◽  
Wafer Surface ◽  
Silicon Wafer Surface
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