Superlattice Structure a-Si Films Fabricated by the Photo-CVD Method and their Application to Solar Cells

1987 ◽  
Vol 26 (Part 1, No. 1) ◽  
pp. 28-32 ◽  
Author(s):  
Shinya Tsuda ◽  
Hisaki Tarui ◽  
Takao Matsuyama ◽  
Tsuyoshi Takahama ◽  
Shoichirou Nakayama ◽  
...  
Keyword(s):  
Solar Cells ◽  
Cvd Method ◽  
Superlattice Structure ◽  
Si Films

High Quality a-Si Films and Superlattice Structure p-Layer a-Si Solar Cells

1986 ◽  
Vol 70 ◽  
Author(s):  
Shoichi Nakano ◽  
Shinya Tsuda ◽  
Hisaki Tarui ◽  
Tsuyoshi Takahama ◽  
Hisao Haku ◽  
...  
Keyword(s):  
Solar Cells ◽  
Conversion Efficiency ◽  
Reaction Chamber ◽  
High Quality ◽  
Cvd Method ◽  
Superlattice Structure ◽  
Si Solar Cells ◽  
New Material ◽  
Si Films ◽  
First Time

ABSTRACTAs a new preparation method for high-quality a-Si films, we have developed the super chamber, a separated UHV reaction chamber system. A low impurity concentration and excellent film properties were obtained by the super chamber. A conversion efficiency of 11.7% was obtained for an a-Si solar cell using a high-quality i-layer deposited by the super chamber, and a p-layer fabricated by a photo-CVD method.As a new material, amorphous superlattice structure films were fabricated by the photo-CVD method for the first time. Quantization effects and low damage to the interfaces were observed. Superlattice structure p-layer a-Si solar cells were fabricated for the first time, and a conversion efficiency of 10.5% was obtained.

Superlattice Structure a-Si Films Prepared by Photo-CVD Method and Their Application to a-Si Solar Cells.

1986 ◽  
Author(s):  
H. Tarui ◽  
T. Matsuyama ◽  
S. Tsuda ◽  
Y. Hishikawa ◽  
T. Takahama ◽  
...  
Keyword(s):  
Solar Cells ◽  
Cvd Method ◽  
Superlattice Structure ◽  
Si Solar Cells ◽  
Si Films

High-Quality a-Si-Based Alloys : a-SiGe Films Fabricated in a Super Chamber and Superlattice Structure a-Si Films Prepared by a Photo-CVD Method

1987 ◽  
Vol 95 ◽  
Author(s):  
Shinya Tsuda ◽  
Hisao Haku ◽  
Hisaki Tarui ◽  
Takao Matsuyama ◽  
Katsunobu Sayama ◽  
...  
Keyword(s):  
Conversion Efficiency ◽  
Photovoltaic Effect ◽  
High Vacuum ◽  
Reaction Chamber ◽  
Wide Bandgap ◽  
Ultra High Vacuum ◽  
High Quality ◽  
Cvd Method ◽  
Superlattice Structure ◽  
Si Films

AbstractIn order to improve the conversion efficiency of a-Si solar cells, high-quality a-Si based alloys of both narrow handgap and wide bandgap were studied.Concerning the narrow bandgap material, we found a particular dependence of film qualities on substrate temperature. In addition, high-quality a-SiGe:H films were obtained by using a super chamber (separated ultra-high vacuum reaction chamber).As for the high-quality wide bandgap material, a-Si/a-SiC superlattice structure films fabricated by a photo-CVD method were studied for the first time. From the analysis of their properties, we found that the superlattice structure p-layer was an active layer for photovoltaic effect. A conversion efficiency of 11.2% has been obtained for a pin a-Si solar cell whose player was of the superlattice structure.

Thin film poly-Si formation for solar cells by Flux method and Cat-CVD method

2001 ◽  
Vol 69 (2) ◽  
pp. 107-114 ◽  
Author(s):  
K Niira ◽  
H Hakuma ◽  
M Komoda ◽  
K Fukui ◽  
K Shirasawa
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Flux Method ◽  
Cvd Method

scholarly journals Toward Cost-Effective Manufacturing of Silicon Solar Cells: Electrodeposition of High-Quality Si Films in a CaCl2-based Molten Salt

2017 ◽  
Vol 56 (47) ◽  
pp. 15078-15082 ◽  
Author(s):  
Xiao Yang ◽  
Li Ji ◽  
Xingli Zou ◽  
Taeho Lim ◽  
Ji Zhao ◽  
...  
Keyword(s):  
Solar Cells ◽  
Molten Salt ◽  
Cost Effective ◽  
Silicon Solar Cells ◽  
High Quality ◽  
Si Films

Luminescence from poly-Si films and its application to study passivating-contact solar cells

2019 ◽  
Author(s):  
H. T. Nguyen ◽  
L. Li ◽  
F. Kremer ◽  
A. Cuevas ◽  
D. Macdonald ◽  
...  
Keyword(s):  
Solar Cells ◽  
Si Films

The light-induced effect of a-Si films and solar cells fabricated by the super chamber

1987 ◽  
Author(s):  
Y. Kuwano ◽  
S. Tsuda ◽  
N. Nakamura ◽  
M. Nishikuni ◽  
K. Yoshida ◽  
...  
Keyword(s):  
Solar Cells ◽  
Si Films

Towards Stabilized 10% Efficiency of Large-Area (> 5000cm2) a-Si/a-SiGe Tandem Solar Cells using High-Rate Deposition

2001 ◽  
Vol 664 ◽  
Author(s):  
Shingo Okamoto ◽  
Akira Terakawa ◽  
Eiji Maruyama ◽  
Wataru Shinohara ◽  
Makoto Tanaka ◽  
...  
Keyword(s):  
Solar Cells ◽  
Layer Structure ◽  
High Rate ◽  
Plasma Cvd ◽  
Large Area ◽  
Tandem Solar Cells ◽  
Cvd Method ◽  
Hydrogen Dilution ◽  
High Photosensitivity ◽  
Deposition Conditions

ABSTRACTThis paper reviews recent progress in large-area a-Si/a-SiGe tandem solar cells in Sanyo. Much effort has been devoted to increasing both the stabilized efficiency and the process throughput. A key issue in increasing the stabilized efficiency is thinner i-layer structure with an improved optical confinement effect. High-rate deposition of the i-layers has been investigated using rf (13.56MHz) plasma-CVD method while keeping the substrate temperature below 200 °C. A high photosensitivity of 106 of a-Si:H films maintain up to the deposition rate (Rd) of 15 Å/s by optimizing hydrogen dilution and other deposition conditions. It is of great importance to utilize the effect of hydrogen dilution which can reduce the incorporation of excess hydrogen in the films. The world's highest conversion efficiency of 11.2% has been achieved for a large-area (8252cm2) a-Si/a-SiGe tandem by combining the optimized hydrogen dilution and other solar cell related technologies.

Large-scale, high-efficiency thin-film silicon solar cells fabricated by short-pulsed plasma CVD method

2006 ◽  
Vol 90 (18-19) ◽  
pp. 3416-3421 ◽  
Author(s):  
Y. Fujioka ◽  
A. Shimizu ◽  
H. Fukuda ◽  
T. Oouchida ◽  
S. Tachibana ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Large Scale ◽  
High Efficiency ◽  
Silicon Solar Cells ◽  
Pulsed Plasma ◽  
Plasma Cvd ◽  
Cvd Method ◽  
Thin Film Silicon
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