Effect of H2Plasma Etching during Glow-Discharge Deposition of Amorphous Carbon Films
1986 ◽
Vol 25
(Part 1, No. 4)
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pp. 511-514
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Keyword(s):
1998 ◽
Vol 16
(2)
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pp. 889-892
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Keyword(s):
1988 ◽
Vol 21
(6)
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pp. 995-998
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2000 ◽
Vol 30
(3)
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pp. 527-532
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1990 ◽
Vol 48
(1)
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pp. 318-319
2019 ◽
Vol 96
◽
pp. 74-84
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