Mechanical properties of silicon carbide films for X-ray lithography application

1992 ◽  
Vol 70 (10-11) ◽  
pp. 834-837 ◽  
Author(s):  
A. Jean ◽  
M. A. El Khakani ◽  
M. Chaker ◽  
E. Gat ◽  
J. Dodier ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Chemical Vapour ◽  
Elastic Recoil ◽  
Free Standing ◽  
X Ray ◽  
Bond Density ◽  
Chemical Vapour Deposition Technique ◽  
Bow Technique

Hydrogenated amorphous silicon carbide a-SixC1−x:H films of various compositions [Formula: see text] were deposited using a plasma-enhanced chemical vapour deposition technique. The as-deposited films are under high compressive stress (1 GPa). The control of the stress relaxation is an important stage in the X-ray mask technology. The stress of the a-SixC1−x:H films is measured by the wafer bow technique, whereas the resonance frequency and the bulge techniques are used to measure the stress of the a-SixC1−x:H free-standing membranes. These three methods give similar results and it is pointed out that the wafer bow technique can be used with confidence to determine the stress of a-SixC1−x:H films intended to X-ray membrane processing. From the bulge method, the biaxial Young's modulus E/(1–ν) of the a-SixC1−x:H membranes is also deduced. Values of 200 ± 25 GPa are obtained for a-SixC1−x:H films at x = 0.4 and 0.5 film compositions. At x = 0.67, E/(1–ν) is reduced by a factor of about two. The structure and composition of the a-SixC1–x:H films were investigated by means of elastic recoil detection, X-ray diffraction, and Fourier transform infrared absorption techniques. It is shown that the biaxial Young's modulus increases with the Si–C bond density in the film.

Hardness and Young's modulus of amorphous a-SiC thin films determined by nanoindentation and bulge tests

1994 ◽  
Vol 9 (1) ◽  
pp. 96-103 ◽  
Author(s):  
M.A. El Khakani ◽  
M. Chaker ◽  
A. Jean ◽  
S. Boily ◽  
J.C. Kieffer ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Silicon Carbide ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Chemical Vapor ◽  
Free Standing ◽  
Film Composition ◽  
Sputtering Deposition ◽  
Sic Films

Due to its interesting mechanical properties, silicon carbide is an excellent material for many applications. In this paper, we report on the mechanical properties of amorphous hydrogenated or hydrogen-free silicon carbide thin films deposited by using different deposition techniques, namely plasma enhanced chemical vapor deposition (PECVD), laser ablation deposition (LAD), and triode sputtering deposition (TSD). a-SixC1−x: H PECVD, a-SiC LAD, and a-SiC TSD thin films and corresponding free-standing membranes were mechanically investigated by using nanoindentation and bulge techniques, respectively. Hardness (H), Young's modulus (E), and Poisson's ratio (v) of the studied silicon carbide thin films were determined. It is shown that for hydrogenated a-SixC1−x: H PECVD films, both hardness and Young's modulus are dependent on the film composition. The nearly stoichiometric a-SiC: H films present higher H and E values than the Si-rich a-SixC1−x: H films. For hydrogen-free a-SiC films, the hardness and Young's modulus were as high as about 30 GPa and 240 GPa, respectively. Hydrogen-free a-SiC films present both hardness and Young's modulus values higher by about 50% than those of hydrogenated a-SiC: H PECVD films. By using the FTIR absorption spectroscopy, we estimated the Si-C bond densities (NSiC) from the Si-C stretching absorption band (centered around 780 cm−1), and were thus able to correlate the observed mechanical behavior of a-SiC films to their microstructure. We indeed point out a constant-plus-linear variation of the hardness and Young's modulus upon the Si-C bond density, over the NSiC investigated range [(4–18) × 1022 bond · cm−3], regardless of the film composition or the deposition technique.

Mechanical properties of FeAlSi powders prepared by mechanical alloying from different initial feedstock materials

2019 ◽  
Vol 107 (2) ◽  
pp. 207 ◽  
Author(s):  
Jaroslav Čech ◽  
Petr Haušild ◽  
Miroslav Karlík ◽  
Veronika Kadlecová ◽  
Jiří Čapek ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Mechanical Alloying ◽  
Young’S Modulus ◽  
Milling Time ◽  
Young's Modulus ◽  
Element Model ◽  
X Ray Diffraction ◽  
X Ray ◽  
Powder Particles ◽  
Complete Homogenization

FeAl20Si20 (wt.%) powders prepared by mechanical alloying from different initial feedstock materials (Fe, Al, Si, FeAl27) were investigated in this study. Scanning electron microscopy, X-ray diffraction and nanoindentation techniques were used to analyze microstructure, phase composition and mechanical properties (hardness and Young’s modulus). Finite element model was developed to account for the decrease in measured values of mechanical properties of powder particles with increasing penetration depth caused by surrounding soft resin used for embedding powder particles. Progressive homogenization of the powders’ microstructure and an increase of hardness and Young’s modulus with milling time were observed and the time for complete homogenization was estimated.

scholarly journals X-ray Diffraction Analysis and Williamson-Hall Method in USDM Model for Estimating More Accurate Values of Stress-Strain of Unit Cell and Super Cells (2 × 2 × 2) of Hydroxyapatite, Confirmed by Ultrasonic Pulse-Echo Test

Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 2949
Author(s):  
Marzieh Rabiei ◽  
Arvydas Palevicius ◽  
Amir Dashti ◽  
Sohrab Nasiri ◽  
Ahmad Monshi ◽  
...  
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Ultrasonic Pulse ◽  
High Accuracy ◽  
Unit Cell ◽  
Deformation Model ◽  
X Ray Diffraction ◽  
Uniform Deformation ◽  
X Ray ◽  
Pulse Echo

Taking into account X-ray diffraction, one of the well-known methods for calculating the stress-strain of crystals is Williamson-Hall (W–H). The W-H method has three models, namely (1) Uniform deformation model (UDM); (2) Uniform stress deformation model (USDM); and (3) Uniform deformation energy density model (UDEDM). The USDM and UDEDM models are directly related to the modulus of elasticity (E). Young’s modulus is a key parameter in engineering design and materials development. Young’s modulus is considered in USDM and UDEDM models, but in all previous studies, researchers used the average values of Young’s modulus or they calculated Young’s modulus only for a sharp peak of an XRD pattern or they extracted Young’s modulus from the literature. Therefore, these values are not representative of all peaks derived from X-ray diffraction; as a result, these values are not estimated with high accuracy. Nevertheless, in the current study, the W-H method is used considering the all diffracted planes of the unit cell and super cells (2 × 2 × 2) of Hydroxyapatite (HA), and a new method with the high accuracy of the W-H method in the USDM model is presented to calculate stress (σ) and strain (ε). The accounting for the planar density of atoms is the novelty of this work. Furthermore, the ultrasonic pulse-echo test is performed for the validation of the novelty assumptions.

scholarly journals Influence of Beam Power on Young’s Modulus and Friction Coefficient of Ti–Ta Alloys Formed by Electron-Beam Surface Alloying

Metals ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 1246
Author(s):  
Stefan Valkov ◽  
Dimitar Dechev ◽  
Nikolay Ivanov ◽  
Ruslan Bezdushnyi ◽  
Maria Ormanova ◽  
...  
Keyword(s):  
Electron Beam ◽  
Young’S Modulus ◽  
Coefficient Of Friction ◽  
Young's Modulus ◽  
Beam Power ◽  
Surface Alloying ◽  
Surface Alloys ◽  
X Ray ◽  
The Coefficient Of Friction ◽  
Beam Surface

In this study, we present the results of Young’s modulus and coefficient of friction (COF) of Ti–Ta surface alloys formed by electron-beam surface alloying by a scanning electron beam. Ta films were deposited on the top of Ti substrates, and the specimens were then electron-beam surface alloyed, where the beam power was varied from 750 to 1750 W. The structure of the samples was characterized by scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDX), and X-ray diffraction (XRD). Young’s modulus was studied by a nanoindentation test. The coefficient of friction was studied by a micromechanical wear experiment. It was found that at 750 W, the Ta film remained undissolved on the top of the Ti, and no alloyed zone was observed. By an increase in the beam power to 1250 and 1750 W, a distinguished alloyed zone is formed, where it is much thicker in the case of 1750 W. The structure of the obtained surface alloys is in the form of double-phase α’and β. In both surface alloys formed by a beam power of 1250 and 1750 W, respectively, Young’s modulus decreases about two times due to different reasons: in the case of alloying by 1250 W, the observed drop is attributed to the larger amount of the β phase, while at 1750 W is it due to the weaker binding forces between the atoms. The results obtained for the COF show that the formation of the Ti–Ta surface alloy on the top of Ti substrate leads to a decrease in the coefficient of friction, where the effect is more pronounced in the case of the formation of Ti–Ta surface alloys by a beam power of 1250 W.

scholarly journals Phase Formation, Microstructure and Mechanical Properties of Mg67Ag33 as Potential Biomaterial

Metals ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 461
Author(s):  
Konrad Kosiba ◽  
Konda Gokuldoss Prashanth ◽  
Sergio Scudino
Keyword(s):  
Mechanical Properties ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Equilibrium Phase ◽  
Antibacterial Properties ◽  
Equilibrium Phase Diagram ◽  
Compressive Yield Strength ◽  
X Ray ◽  
Fine Grained ◽  
Equilibrium Phases

The phase and microstructure formation as well as mechanical properties of the rapidly solidified Mg67Ag33 (at. %) alloy were investigated. Owing to kinetic constraints effective during rapid cooling, the formation of equilibrium phases is suppressed. Instead, the microstructure is mainly composed of oversaturated hexagonal closest packed Mg-based dendrites surrounded by a mixture of phases, as probed by X-ray diffraction, electron microscopy and energy dispersive X-ray spectroscopy. A possible non-equilibrium phase diagram is suggested. Mainly because of the fine-grained dendritic and interdendritic microstructure, the material shows appreciable mechanical properties, such as a compressive yield strength and Young’s modulus of 245 ± 5 MPa and 63 ± 2 GPa, respectively. Due to this low Young’s modulus, the Mg67Ag33 alloy has potential for usage as biomaterial and challenges ahead, such as biomechanical compatibility, biodegradability and antibacterial properties are outlined.

Measurement of Young’s modulus and damping for hexoloy SG silicon carbide

1999 ◽  
Vol 41 (6) ◽  
pp. 611-615 ◽  
Author(s):  
A. Wolfenden ◽  
A.C. Anthony ◽  
M. Singh
Keyword(s):  
Silicon Carbide ◽  
Young’S Modulus ◽  
Young's Modulus

scholarly journals Improved Osseointegration of a TiNbSn Alloy with a Low Young’s Modulus Treated with Anodic Oxidation

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Tomonori Kunii ◽  
Yu Mori ◽  
Hidetatsu Tanaka ◽  
Atsushi Kogure ◽  
Masayuki Kamimura ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Sulfuric Acid ◽  
Young’S Modulus ◽  
Anodic Oxidation ◽  
Photoelectron Spectroscopy ◽  
Young's Modulus ◽  
Ti6al4v Alloy ◽  
Apatite Formation ◽  
X Ray ◽  
Pull Out

Abstract Ti6Al4V alloy orthopedic implants are widely used as Ti6Al4V alloy is a biocompatible material and resistant to corrosion. However, Ti6Al4V alloy has higher Young’s modulus compared with human bone. The difference of elastic modulus between bone and titanium alloy may evoke clinical problems because of stress shielding. To resolve this, we previously developed a TiNbSn alloy offering low Young’s modulus and improved biocompatibility. In the present study, the effects of sulfuric acid anodic oxidation on the osseointegration of TiNbSn alloy were assessed. The apatite formation was evaluated with Scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and transmission electron microscopy analyses. The biocompatibility of TiNbSN alloy was evaluated in experimental animal models using pull-out tests and quantitative histological analyses. The results of the surface analyses indicated that sulfuric anodic oxidation induced abundant superficial apatite formation of the TiNbSn alloy disks and rods, with a 5.1-µm-thick oxide layer and submicron-sized pores. In vivo, treated rods showed increased mature lamellar bone formation and higher failure loads compared with untreated rods. Overall, our findings indicate that anodic oxidation with sulfuric acid may help to improve the biocompatibility of TiNbSn alloys for osseointegration.

Micromechanical characterization of chemically vapor deposited ceramic films

1994 ◽  
Vol 9 (8) ◽  
pp. 2072-2078 ◽  
Author(s):  
J.M. Grow ◽  
R.A. Levy
Keyword(s):  
Silicon Carbide ◽  
Silicon Nitride ◽  
Boron Nitride ◽  
Silicon Dioxide ◽  
Boron Carbide ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Ceramic Films ◽  
Chemically Vapor Deposited ◽  
Micromechanical Characterization

In this study, nanoindentation is used to determine Young's modulus of chemically vapor deposited films consisting of silicon carbide, silicon nitride, boron carbide, boron nitride, and silicon dioxide. Diethylsilane and ditertiarybutylsilane were used as precursors in the synthesis of the silicon-based material, while triethylamine borane complex was used for the boron-based material. The modulus of these films was observed to be dependent on the processing conditions and resulting composition of the deposits. For the silicon carbide, silicon nitride, boron carbide, and boron nitride films, the carbon content in the films was observed to increase significantly with higher deposition temperatures, resulting in a corresponding decrease in values of Young's modulus. The composition of the silicon dioxide films was near stoichiometry over the investigated deposition temperature range (375–475 °C) with correspondingly small variations in the micromechanical properties. Subsequent annealing of these oxide films resulted in a significant increase in the values of Young's modulus due to hydrogen and moisture removal.

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