Hydrogen-assisted reactive evaporation of quasi-stoichiometric polycrystalline InSb films
Keyword(s):
X Ray
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We report here a new technique for evaporating polycrystalline InSb films, using hydrogen beams as carriers for each elemental source. The films obtained show X-ray diffraction patterns before annealing that are totally exempt from impurity peaks, unlike those other workers have previously reported for evaporated InSb.