Photocorrosion of hydrogenated amorphous silicon: effect of the solvent
Keyword(s):
The photocorrosion of amorphous hydrogenated silicon (a-Si:H) in different solvents was studied. Impedance measurements were performed under potentiostatic conditions. At each potential, the impedance Z(ω, V) was determined in the frequency range 5 Hz–100 kHz. The Z(ω, V) diagrams were analyzed and the corrosion sensitivity of the material in different electrolytes was determined. A correlation between electroactivity domain and ac impedance curves is proposed. A relationship is used to describe the anodic corrosion process in different solvents. The electrolyte that shows no oxide growth at the semiconductor – electrolyte interface was deduced.
1981 ◽
Vol 42
(C4)
◽
pp. C4-773-C4-777
◽