Large-area plasma excitation in densely arrayed radial line slot antennas using TE11 rotating mode

2004 ◽  
Vol 82 (6) ◽  
pp. 489-493
Author(s):  
T Yamamoto ◽  
N Ishii
Keyword(s):  
Large Diameter ◽  
Slot Antenna ◽  
Large Area ◽  
Radial Line ◽  
Slot Antennas ◽  
Plasma Production ◽  
Plasma Distribution ◽  
Feeding Structure ◽  
Plasma Excitation ◽  
Uniform Plasma

A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to different coupling slot distributions is verified. PACS No.: 52.40.Fd

Design of Radial Line Slot Antennas at 8.3 GHz for Large Area Uniform Plasma Generation

1999 ◽  
Vol 38 (Part 1, No. 4A) ◽  
pp. 2082-2088 ◽  
Author(s):  
Tetsuya Yamamoto ◽  
Nguyen Thang Chien ◽  
Makoto Ando ◽  
Naohisa Goto ◽  
Masaki Hirayama ◽  
...  
Keyword(s):  
Large Area ◽  
Radial Line ◽  
Slot Antennas ◽  
Plasma Generation ◽  
Uniform Plasma

Characteristics of large-diameter plasma using a radial-line slot antenna

2006 ◽  
Vol 24 (4) ◽  
pp. 1421-1424 ◽  
Author(s):  
C. Tian ◽  
T. Nozawa ◽  
K. Ishibasi ◽  
H. Kameyama ◽  
T. Morimoto
Keyword(s):  
Large Diameter ◽  
Slot Antenna ◽  
Radial Line

Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing

2007 ◽  
Vol 127 ◽  
pp. 239-244 ◽  
Author(s):  
Yuichi Setsuhara ◽  
Kosuke Takenaka ◽  
Akinori Ebe ◽  
Kazuaki Nishisaka
Keyword(s):  
Plasma Reactor ◽  
Flat Panel Display ◽  
Rf Power ◽  
Large Area ◽  
Plasma Production ◽  
Plasma Sources ◽  
Scale Size ◽  
Profile Control ◽  
Scale Reactor ◽  
Uniform Plasma

This article reports characteristics of plasmas sustained with LIA modules and profile control capabilities. Experiments with a meter-scale reactor demonstrated uniform plasma production to attain densities as high as 5x1011 cm-3 at an argon pressure of 1.3 Pa and an RF power of 4 kW. Design issues for large-area plasma sources with a scale-size of 3 m were also presented to exhibit the feasibility of novel large-area plasma sources to meet the requirements of the next-generation meters-scale processing.

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